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VLSI Science and Technology/1984

VLSI Science and Technology/1984 PDF Author: Kenneth E. Bean
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 554

Book Description

VLSI Science and Technology/1984

VLSI Science and Technology/1984 PDF Author: Kenneth E. Bean
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 554

Book Description

VLSI Science and Technology

VLSI Science and Technology PDF Author:
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 526

Book Description

Microelectronic Materials and Processes

Microelectronic Materials and Processes PDF Author: R.A. Levy
Publisher: Springer Science & Business Media
ISBN: 9400909179
Category : Technology & Engineering
Languages : en
Pages : 992

Book Description
The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia and industry who have come together to blend their expertise into a tutorial overview and cohesive update of this rapidly expanding field. A balance of fundamental and applied contributions cover the basics of microelectronics materials and process engineering. Subjects in materials science include silicon, silicides, resists, dielectrics, and interconnect metallization. Subjects in process engineering include crystal growth, epitaxy, oxidation, thin film deposition, fine-line lithography, dry etching, ion implantation, and diffusion. Other related topics such as process simulation, defects phenomena, and diagnostic techniques are also included. This book is the result of a NATO-sponsored Advanced Study Institute (AS!) held in Castelvecchio Pascoli, Italy. Invited speakers at this institute provided manuscripts which were edited, updated, and integrated with other contributions solicited from non-participants to this AS!.

Proceedings of the Symposium on Reduced Temperature Processing for VLSI

Proceedings of the Symposium on Reduced Temperature Processing for VLSI PDF Author: Rafael Reif
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 634

Book Description

Ion Implantation Science and Technology

Ion Implantation Science and Technology PDF Author: J.F. Ziegler
Publisher: Elsevier
ISBN: 0323144012
Category : Science
Languages : en
Pages : 649

Book Description
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

Semiconductor Measurement Technology

Semiconductor Measurement Technology PDF Author: United States. National Bureau of Standards
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 64

Book Description

Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies

Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies PDF Author: L. B. Rothman
Publisher:
ISBN:
Category : Electronics
Languages : en
Pages : 288

Book Description

ULSI Science and Technology/1987

ULSI Science and Technology/1987 PDF Author: S. Broydo
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 874

Book Description

Handbook of Semiconductor Manufacturing Technology

Handbook of Semiconductor Manufacturing Technology PDF Author: Yoshio Nishi
Publisher: CRC Press
ISBN: 9780824787837
Category : Technology & Engineering
Languages : en
Pages : 1186

Book Description
The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."

Technology of Si, Ge, and SiC / Technologie Von Si, Ge und SiC

Technology of Si, Ge, and SiC / Technologie Von Si, Ge und SiC PDF Author: W. Dietze
Publisher: Springer Science & Business Media
ISBN: 9783540114741
Category : Science
Languages : en
Pages : 680

Book Description

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