Author: Lynn E. Rehn
Publisher: Cambridge University Press
ISBN: 9781107410879
Category : Technology & Engineering
Languages : en
Pages : 790
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Processing and Characterization of Materials using Ion Beams:
Author: Lynn E. Rehn
Publisher: Cambridge University Press
ISBN: 9781107410879
Category : Technology & Engineering
Languages : en
Pages : 790
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Publisher: Cambridge University Press
ISBN: 9781107410879
Category : Technology & Engineering
Languages : en
Pages : 790
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Processing and Characterization of Materials Using Ion Beams, Symposium Held in Boston, Massachusetts on November 28 - December 2, 1988. Materials Research Society Symposium Proceedings
Processing and Characterization of Materials Using Ion Beams: Volume 128
Author: Lynn E. Rehn
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 800
Book Description
Author index.
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 800
Book Description
Author index.
Ion-Solid Interactions
Author: Michael Nastasi
Publisher: Cambridge University Press
ISBN: 052137376X
Category : Science
Languages : en
Pages : 572
Book Description
Comprehensive guide to an important materials science technique for students and researchers.
Publisher: Cambridge University Press
ISBN: 052137376X
Category : Science
Languages : en
Pages : 572
Book Description
Comprehensive guide to an important materials science technique for students and researchers.
Rapid Thermal Processing
Author: Richard B. Fair
Publisher: Academic Press
ISBN: 0323139809
Category : Technology & Engineering
Languages : en
Pages : 441
Book Description
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Publisher: Academic Press
ISBN: 0323139809
Category : Technology & Engineering
Languages : en
Pages : 441
Book Description
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Ion Beam Processing of Advanced Electronic Materials: Volume 147
Author: N. W. Cheung
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 434
Book Description
Papers presented at the Symposium on Ion Beam Processing of Advanced Electronic Materials.
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 434
Book Description
Papers presented at the Symposium on Ion Beam Processing of Advanced Electronic Materials.
Ion Beams in Materials Processing and Analysis
Author: Bernd Schmidt
Publisher: Springer Science & Business Media
ISBN: 3211993568
Category : Technology & Engineering
Languages : en
Pages : 425
Book Description
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.
Publisher: Springer Science & Business Media
ISBN: 3211993568
Category : Technology & Engineering
Languages : en
Pages : 425
Book Description
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.
Material Characterization Using Ion Beams
Author: J Thomas
Publisher:
ISBN: 9781468408577
Category :
Languages : en
Pages : 536
Book Description
Publisher:
ISBN: 9781468408577
Category :
Languages : en
Pages : 536
Book Description
Atomic Scale Calculations in Materials Science
Author: J. Tersoff
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 504
Book Description
Methods. Electronic structure. Structural properties and phonons. Point and line defects. Interfaces and surfaces.
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 504
Book Description
Methods. Electronic structure. Structural properties and phonons. Point and line defects. Interfaces and surfaces.
Review, Naval Research Laboratory, Washington, D.C.
Author: United States. Office of Naval Research
Publisher:
ISBN:
Category :
Languages : en
Pages : 312
Book Description
Publisher:
ISBN:
Category :
Languages : en
Pages : 312
Book Description