Author: Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 240
Book Description
Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing
Author: National Semiconductor Metrology Program
Author: National Semiconductor Metrology Program (U.S.)Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 160
Book Description
National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999
Author: National Semiconductor Metrology Program
Author: National Institute of Standards and Technology (U.S.)Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 160
Book Description
Proceedings of the Symposium on Crystalline Defects and Contamination, Their Impact and Control in Device Manufacturing II
Author: Bernd O. Kolbesen (Chemiker.)Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 536
Book Description
National Semiconductor Metrology Program, NIST List OF Publications, LP 103, May 2000
Author: 国立国会図書館所蔵科学技術関係欧文会議錄目錄
Author: 国立国会図書館 (Japan)Publisher:
ISBN:
Category : Science
Languages : en
Pages : 1592
Book Description
Kokuritsu Kokkai Toshokan shozō kagaku gijutsu kankei Ōbun kaigiroku mokuroku
Author: Kokuritsu Kokkai Toshokan (Japan)Publisher:
ISBN:
Category : Science
Languages : en
Pages : 1596
Book Description
国立国会図書館所蔵科学技術関係欧文会議錄目錄
Author: Light Scattering from Microstructures
Author: Fernando MorenoPublisher: Springer
ISBN: 3540466142
Category : Technology & Engineering
Languages : en
Pages : 293
Book Description
The classical phenomenon of light scattering is one of the most studied t- ics in light-matter interaction and, even today, involves some controversial issues. A present focus of interest for many researchers is the possibility of obtaining information about microstructures, for example surface roughness, and the size, shape and optical properties of particles by means of a n- invasive technique such as the illumination of these objects with light. One of their main tasks is to extract the relevant information from a detailed study of the scattered radiation. This includes: measurement of the light intensity in di erent directions, analysis of its polarization, determination of its stat- tics,etc. Contributionstoresolvingthisproblemareimportantnotonlyfrom the point of view of increasing basic knowledge but also in their applications to several elds of industry and technology. Consider, for example, the pos- bility of distinguishing between di erent types of atmospheric contaminants, biological contaminants in our blood, the detection of microdefects in the manufacturing of semiconductors, magnetic discs and optical components, or the development of biological sensors. During the period September 11-13, 1998, we brought together a group of international experts on light scattering at the Summer School of Laredo at the University of Cantabria. In a series of one-hour lectures, they discussed currentaspectsoflightscatteringfrommicrostructureswithspecialemphasis on recent applications. The present book condenses those lectures into ve parts.