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Author: A. I. Smolyakov Publisher: ISBN: Category : Languages : en Pages : 2
Book Description
Modern inductively coupled plasma (ICP) sources tend to operate at low frequencies (several MHz and less) that reduces capacitive coupling and transmission line effects and leads to simpler and lower cost rf power sources and matching circuits. Together with a low neutral gas pressure (1-10 mTorr) this creates a unique combination of conditions where two features of inductively coupled plasmas become most prominent: anomalous (non-collisional) heating and nonlinearity due to the Lorentz force. When the electrons are weakly collisional, the collisionless wave particle interaction (Landau damping) replaces real collisions and becomes the main mechanism of the wave absorption and plasma heating 1. In this regime, the electron mean free path exceeds the characteristic plasma length scale so that electrons "sample" the electric field over large distance resulting in the electric current being not a local function of the electric field. This regime is often referred to as nonlocal regime as opposite to the local, or short mean free path, highly collisional regime of the classical skin effect. The related property of the low frequency ICP is due to the fact that the nonlinear Lorentz force can be much larger than the force of the inductive electric field REGIME OF THE ELECTRON Hall magnetohydrodynamics (EMHD). Nonlinear forces in ICP may significantly affect plasma density profile 2, generate higher harmonics of the electric current 3, electrostatic potential 4,5, and modify the skin-effect 6. In this paper we review the experimental data and theoretical models describing these effects.
Author: A. I. Smolyakov Publisher: ISBN: Category : Languages : en Pages : 2
Book Description
Modern inductively coupled plasma (ICP) sources tend to operate at low frequencies (several MHz and less) that reduces capacitive coupling and transmission line effects and leads to simpler and lower cost rf power sources and matching circuits. Together with a low neutral gas pressure (1-10 mTorr) this creates a unique combination of conditions where two features of inductively coupled plasmas become most prominent: anomalous (non-collisional) heating and nonlinearity due to the Lorentz force. When the electrons are weakly collisional, the collisionless wave particle interaction (Landau damping) replaces real collisions and becomes the main mechanism of the wave absorption and plasma heating 1. In this regime, the electron mean free path exceeds the characteristic plasma length scale so that electrons "sample" the electric field over large distance resulting in the electric current being not a local function of the electric field. This regime is often referred to as nonlocal regime as opposite to the local, or short mean free path, highly collisional regime of the classical skin effect. The related property of the low frequency ICP is due to the fact that the nonlinear Lorentz force can be much larger than the force of the inductive electric field REGIME OF THE ELECTRON Hall magnetohydrodynamics (EMHD). Nonlinear forces in ICP may significantly affect plasma density profile 2, generate higher harmonics of the electric current 3, electrostatic potential 4,5, and modify the skin-effect 6. In this paper we review the experimental data and theoretical models describing these effects.
Author: V. Tsytovich Publisher: Springer Science & Business Media ISBN: 1468417886 Category : Science Languages : en Pages : 344
Book Description
For some time now there has been an interest in the nop. linear interaction of electromagnetic waves in plasma [1,2]. But only in the last few years has the theory of nonlinear wave inter action effects undergone such vigorous development as to result in the formulation of clear phYSical concepts regarding the mech anisms of interaction. This development has been engendered by attempts to solve many of the plasma-physical problems accom panying the tremendous growth of experimental research [3]. The importance of nonlinear effects in modern plasma physics is dis cussed in detail in Chap. I. At this point we merely stress the fact that today the analysis of nonlinear effects is a practical ne cessity in any experiment involving plasma instabilities. We should also point out that plasma instabilities can assert them selves extensively in solids (solid state plasma) and play an im portant part in the study of cosmic plasma. Consequently, the problems of nonlinear wave interaction in plasma are of concern to those working in widely different areas of physics. Yet it is difficult to assimilate the results of investigations on nonlinear effects, owing to the complicated way in which the results of orig inal research are presented. In the present book the author hopes in some measure to fill the need for a text on the physics of non linear effects that is accessible to a fairly general audience.
Author: Publisher: ISBN: Category : Languages : en Pages :
Book Description
In this thesis the nonlinear effects and heating are studied in inductively coupled plasma (ICP) in a regime of anomalous skin effect (nonlocal regime). In this regime the thermal motion of plasma electrons plays an important role, significantly influencing the processes associated with the penetration of electromagnetic field into plasma, such as the ponderomotive effect and heating of plasma by the field. We have developed a linear kinetic theory that describes the electron dynamics in ICP taking into account the electron thermal motion and collisions of electrons. This theory yields relatively simple expressions for the electron current in plasma, the ponderomotive force, and plasma heating. It describes correctly the thermal reduction of ponderomotive force in the nonlocal regime, which has been previously observed experimentally. It also describes the collisionless heating of plasma due to resonant interaction between the electromagnetic wave and plasma electrons. There is a good overall agreement of the results of our theory with the experimental data on ponderomotive force and plasma heating. Using our theory, we predicted a new effect of reduction of plasma heating compared to the purely collisional value, occurring at low frequencies. This effect has not been previously reported. The nonlinear effects of the electromagnetic field on the electron distribution function and on plasma heating, that are not accounted for in the linear kinetic theory, have been studied using a quasilinear kinetic theory, also developed in this thesis. Within the quasilinear approximation we have formulated the system of equations describing the slow response of plasma electrons to the fast oscillating electromagnetic field. As an example, these equations have been solved in the simplest case of cold plasma with collisions, and the nonlinear perturbation of the electron distribution function and its effect on the plasma heating have been found. It has been shown that the nonlinear.
Author: A. Hasegawa Publisher: Springer Science & Business Media ISBN: 3642659802 Category : Science Languages : en Pages : 229
Book Description
In recent years the significant progress in satellite-based observations of plasma states and associated electromagnetic phenomena in space has resulted in the accumulation of much evidence of various plasma instabilities. Today plasma instabilities are believed to be responsible for electromagnetic radiation as well as for many of the macroscopic dynamics of plasmas in space. Most students who begin to study plasma physics are intrigued by the unstable nature of plasmas compared with other states of matter; however, they often become frustrated because there are so many in stabilities. Such frustration explains in part why there is no textbook which treats this subject exclusively. A description of plasma instabilities in a systematic way is nontrivial and takes a pertinacious effort. This book is an attempt to provide a basic introduction on the subject and covers most of the important instabilities. However, the author must apologize for any omission of references to contributions of individuals who deserve more credit. The reader is assumed to have a general knowledge of plasma physics obtainable in an undergraduate course. The book is intended to be used as a reference text on the subject of plasma instabilities at the under graduate level as well as for a text in a special course in graduate school. Because the book is part of a series on physics and chemistry in space, emphasis is placed on plasma instabilities relevant in space plasmas.
Author: A. I. Akhiezer Publisher: Elsevier ISBN: 1483148076 Category : Science Languages : en Pages : 320
Book Description
Plasma Electrodynamics, Volume 2: Non-Linear Theory and Fluctuations deals with the theory of nonlinear waves in a collisionless plasma, including the quasilinear theory, the theory of plasma turbulence, and the theory of electromagnetic fluctuations in a plasma. Topics covered range from nonlinear high-frequency waves in a cold plasma to the theory of plasma oscillations in the quasilinear approximation. Nonlinear wave-particle interactions are also discussed, along with scattering and transformation of waves in a plasma. Comprised of six chapters, this volume begins with a study of nonlinear waves in a collisionless plasma, focusing on nonlinear high-frequency waves in a cold plasma; Langmuir waves in a non-relativistic plasma; and longitudinal, transverse, and coupled longitudinal-transverse waves in a relativistic plasma. After expounding on the quasilinear theory, which describes the effects of the first approximation in terms of the plasma wave energy, the nonlinear interaction of waves and particles is considered. The last three chapters explore the theory of electromagnetic fluctuations in a plasma; the theory of scattering processes and the transformation of waves in a plasma; and the scattering of charged particles in a plasma. The polarization energy losses when charged particles move in a plasma are calculated. This book will be of interest to physicists.
Author: Ken Ostrikov Publisher: John Wiley & Sons ISBN: 3527611568 Category : Technology & Engineering Languages : en Pages : 315
Book Description
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
Author: V. Stefan Publisher: Springer Science & Business Media ISBN: 9780883187876 Category : Science Languages : en Pages : 786
Book Description
"Blurb & Contents" Culled from the thousands of papers published in American Institute of Physics Soviet Translation journals during 1987 and 1988, this reprint collection presents 91 of the Russia's finest papers on semiconductor physics and technology. In their selections, the editors were advised and assisted by leading experts in the field from both Russia and the United States, resulting in a collection objectively representing only the most important and enduring Russian contributions to semiconductor physics and technology.
Author: Michael A. Lieberman Publisher: John Wiley & Sons ISBN: 1394245394 Category : Technology & Engineering Languages : en Pages : 837
Book Description
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Author: A. I. Smolyakov
Author: A. I. Smolyakov
Author: V. Tsytovich
Author: 
Author: A. Hasegawa
Author: Gabor Kalman
Author: A. I. Akhiezer
Author: Ken Ostrikov
Author: V. Stefan
Author: 
Author: Michael A. Lieberman