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Author: Sami Franssila Publisher: John Wiley & Sons ISBN: 0470020563 Category : Technology & Engineering Languages : en Pages : 424
Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Author: Sami Franssila Publisher: John Wiley & Sons ISBN: 0470020563 Category : Technology & Engineering Languages : en Pages : 424
Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Author: Daniel J. Ehrlich Publisher: Elsevier ISBN: 0080918026 Category : Technology & Engineering Languages : en Pages : 602
Book Description
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Author: Ivor Brodie Publisher: Springer Science & Business Media ISBN: 1489921605 Category : Technology & Engineering Languages : en Pages : 518
Book Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Author: Sami Franssila Publisher: John Wiley & Sons ISBN: 1119991897 Category : Technology & Engineering Languages : en Pages : 534
Book Description
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Author: Yei Hwan Jung Publisher: ISBN: Category : Languages : en Pages : 162
Book Description
Thin films are layers of materials with thicknesses ranging from sub-nanometers to several micrometers. In engineering, thin films are attractive because of their exceptional materials properties that are ideal for a wide range of applications. At micro-scale, thin films are extremely difficult to handle because of the delicacy of the films that can easily break or tear apart with slight mechanical deformations. Therefore, microfabrication of thin films has long been a challenge in most fields. In this work, conventional microfabrication techniques were modified to fabricate various thin films, including high-performance flexible and stretchable electronics and biodegradable electronics. Moreover, the techniques used for fabricating such devices were implemented to create thin film scaffolds that can benefit stem cell replacement therapy. Recent progresses in flexible or stretchable electronics and unconventional microfabrication technology present a route to creating high-performance biocompatible materials in forms that enable conformal contacts to the curvilinear surfaces, such as skin, tissues and organs. One of the key technology missing for such thin film electronics was the high-frequency operation of electronics, which enables wireless communications and high-speed data transfers. New device designs and fabrication strategies were developed for high-frequency flexible and stretchable electronic components, which possess state-of-the-art performance that would lead to electronics capable of high-frequency operations using purely thin film components. Moreover, thin film electronics are not only advantageous for creating flexible and stretchable electronics, but also for tremendously reducing the amount of inorganic materials used for electronics manufacture. Thus, the fabrication techniques were utilized to demonstrate a complete set of green device components required for high-performance electronics using modified microfabrication techniques and thin film components on biodegradable wood-derived films. Finally, the unique precision manufacturing capabilities in microfabrication technology were applied to create complex micro-structures on polymer thin films for stem cell transplantation scaffolds. The demonstrated transplantable thin film scaffold with micro-structures can guide the polarization of retinal stem cells, offering replacement therapy for the patients who were limited to no treatment options.
Author: Publisher: Academic Press ISBN: 0080542948 Category : Science Languages : en Pages : 495
Book Description
Frontiers of Thin Film Technology, Volume 28 focuses on recent developments in those technologies that are critical to the successful growth, fabrication, and characterization of newly emerging solid-state thin film device architectures. Volume 28 is a condensed sampler of the Handbook for use by professional scientists, engineers, and students involved in the materials, design, fabrication, diagnostics, and measurement aspects of these important new devices.
Author: Kiyotaka Wasa Publisher: William Andrew ISBN: 0815519311 Category : Technology & Engineering Languages : en Pages : 533
Book Description
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
Author: Krishna Seshan Publisher: ISBN: 9786612253195 Category : Chemical vapor deposition Languages : en Pages : 629
Book Description
The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Author: Sami Franssila
Author: Sami Franssila
Author: Daniel J. Ehrlich
Author: Ivor Brodie
Author: Sami Franssila
Author: Yei Hwan Jung
Author: 
Author: James E. Steinwall
Author: Kiyotaka Wasa
Author: Krishna Seshan
Author: Miri Park