Author: Thomas Joseph Donahue
Publisher:
ISBN:
Category : Silicon crystals
Languages : en
Pages : 9
Book Description
Low Temperature Silicon Epitaxy Using Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Author: Thomas Joseph Donahue
Publisher:
ISBN:
Category : Silicon crystals
Languages : en
Pages : 9
Book Description
Publisher:
ISBN:
Category : Silicon crystals
Languages : en
Pages : 9
Book Description
Low Temperature Silicon Epitaxy Using Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Low Temperature Silicon Epitaxy by Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Low Temperature Silicon Epitaxy by Low Pressure Chemical Vapor Deposition with and Without Plasma Enchancement
Author: Wayne Robert Burger
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 119
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 119
Book Description
Low Temperature and Low Pressure Silicon Epitaxy by Plasma-Enhanced CVD
Author: R. Reif
Publisher:
ISBN:
Category : Autodoping
Languages : en
Pages : 3
Book Description
This paper reviews the most recent results obtained using a very low pressure, plasma enhanced chemical vapor deposition technique for low temperature (650-800°C) silicon epitaxy. Initial results on autodoping studies and on p-n junctions and MOS transistors fabricated in these films are briefly discussed.
Publisher:
ISBN:
Category : Autodoping
Languages : en
Pages : 3
Book Description
This paper reviews the most recent results obtained using a very low pressure, plasma enhanced chemical vapor deposition technique for low temperature (650-800°C) silicon epitaxy. Initial results on autodoping studies and on p-n junctions and MOS transistors fabricated in these films are briefly discussed.
Low Temperature Epitaxial Deposition of Silicon by Plasma Enhanced CVD (Chemical Vapor Deposition).
Author: L. R. Reif
Publisher:
ISBN:
Category :
Languages : en
Pages : 12
Book Description
A reactor system has been developed to deposit specular epitaxial silicon films at temperatures as low as 620 C using a low pressure chemical vapor deposition process both with and without plasma enhancement. This represents the lowest silicon epitaxial deposition temperature ever reported for a thermally driven chemical vapor deposition process. Experiments performed at 775 C indicate that the predeposition in-situ cleaning of the substrate surface is the critical step in determining whether epitaxial deposition will occur. Surface cleaning in these experiments was done by sputtering in an argon plasma ambient at the deposition temperature while applying a dc bias to the susceptor. This is the lowest pre-epitaxial cleaning temperature ever reported for a thermally driven chemical vapor deposition. (Author).
Publisher:
ISBN:
Category :
Languages : en
Pages : 12
Book Description
A reactor system has been developed to deposit specular epitaxial silicon films at temperatures as low as 620 C using a low pressure chemical vapor deposition process both with and without plasma enhancement. This represents the lowest silicon epitaxial deposition temperature ever reported for a thermally driven chemical vapor deposition process. Experiments performed at 775 C indicate that the predeposition in-situ cleaning of the substrate surface is the critical step in determining whether epitaxial deposition will occur. Surface cleaning in these experiments was done by sputtering in an argon plasma ambient at the deposition temperature while applying a dc bias to the susceptor. This is the lowest pre-epitaxial cleaning temperature ever reported for a thermally driven chemical vapor deposition. (Author).
Low-temperature Silicon Epitaxy Deposited by Plasma Enhanced Chemical Vapor Deposition
Author: T. J. Donahue
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 22
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 22
Book Description
Low-temperature Silicon Epitaxy Deposited by Plasma Enhanced Chemical Vapor Deposition
Author: T. J. Donahue
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 17
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 17
Book Description
Characterization of Low-temperature Silicon Epitaxy Deposited by Plasma Enhanced Chemical Vapor Deposition
Author: T. J. Donahue
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 29
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 29
Book Description
Low-temperature Silicon Epitaxy Deposited by Very Low Pressure Chemical Vapor Deposition
Author: T. J. Donahue
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 30
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 30
Book Description