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Author: Yang Zhao Publisher: ISBN: Category : Languages : en Pages : 194
Book Description
"Measuring physical dimensions has always been one of the challenges for optical metrology. Specifically, the thickness is often a prerequisite piece of information for other optical properties when characterizing components and materials. For example, when measuring the index of refraction of materials using interferometric methods, the direct measurement is optical path length difference. To acquire index of refraction with high accuracy, the thickness must be predetermined with correspondingly high accuracy as well. In this dissertation, a prototype low-coherence interferometer system is developed through several design iterations to measure the absolute thickness map of a plane-parallel samples in a nondestructive manner. The prototype system is built with all off-the-shelf components in a configuration that combines a Twyman-Green interferometer and a Sagnac interferometer. The repeatability and accuracy of the measured thickness are characterized to be less than one micrometer. Based on the information acquired from the development of the prototype system, a permanent low-coherence interferometer system is designed and built to achieve a higher accuracy in thickness measurements, on the level of a hundred nanometers. A comprehensive uncertainty model is established for the thickness measurement using the low-coherence interferometer system. Additionally, this system is also capable of measuring the topography of both surfaces of the sample, as well as the wedge of the sample. This low-coherence dimensional metrology uses only the reflection signals from the sample surfaces. Thus, the measured physical dimensions are independent of the index of refraction, transparency, transmission, or homogeneity of the sample. In addition, a laser Sagnac interferometer is designed and built by repurposing the test arm of the low-coherence interferometer. The laser Sagnac interferometer provides a non-contact bulk index of refraction metrology for solid materials. The uncertainty model for the index of refraction measurement is detailed with analytical solutions. The laser Sagnac interferometer requires relatively simple sample preparation and fast turn-around time, which is suitable for applications in optical material research"--Pages x-xi.
Author: Yang Zhao Publisher: ISBN: Category : Languages : en Pages : 194
Book Description
"Measuring physical dimensions has always been one of the challenges for optical metrology. Specifically, the thickness is often a prerequisite piece of information for other optical properties when characterizing components and materials. For example, when measuring the index of refraction of materials using interferometric methods, the direct measurement is optical path length difference. To acquire index of refraction with high accuracy, the thickness must be predetermined with correspondingly high accuracy as well. In this dissertation, a prototype low-coherence interferometer system is developed through several design iterations to measure the absolute thickness map of a plane-parallel samples in a nondestructive manner. The prototype system is built with all off-the-shelf components in a configuration that combines a Twyman-Green interferometer and a Sagnac interferometer. The repeatability and accuracy of the measured thickness are characterized to be less than one micrometer. Based on the information acquired from the development of the prototype system, a permanent low-coherence interferometer system is designed and built to achieve a higher accuracy in thickness measurements, on the level of a hundred nanometers. A comprehensive uncertainty model is established for the thickness measurement using the low-coherence interferometer system. Additionally, this system is also capable of measuring the topography of both surfaces of the sample, as well as the wedge of the sample. This low-coherence dimensional metrology uses only the reflection signals from the sample surfaces. Thus, the measured physical dimensions are independent of the index of refraction, transparency, transmission, or homogeneity of the sample. In addition, a laser Sagnac interferometer is designed and built by repurposing the test arm of the low-coherence interferometer. The laser Sagnac interferometer provides a non-contact bulk index of refraction metrology for solid materials. The uncertainty model for the index of refraction measurement is detailed with analytical solutions. The laser Sagnac interferometer requires relatively simple sample preparation and fast turn-around time, which is suitable for applications in optical material research"--Pages x-xi.
Author: Kevin Harding Publisher: Taylor & Francis ISBN: 1439854823 Category : Science Languages : en Pages : 497
Book Description
Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods
Author: Richard Leach Publisher: Springer Science & Business Media ISBN: 3642120121 Category : Technology & Engineering Languages : en Pages : 333
Book Description
The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of modern optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.
Author: Christopher Taudt Publisher: Springer Nature ISBN: 3658359269 Category : Science Languages : en Pages : 180
Book Description
This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 μm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach.
Author: Luigi Cocco Publisher: BoD – Books on Demand ISBN: 9535105841 Category : Technology & Engineering Languages : en Pages : 474
Book Description
"What are the recent developments in the field of Metrology?" International leading experts answer this question providing both state of the art presentation and a road map to the future of measurement science. The book is organized in six sections according to the areas of expertise, namely: Introduction; Length, Distance and Surface; Voltage, Current and Frequency; Optics; Time and Relativity; Biology and Medicine. Theoretical basis and applications are explained in accurate and comprehensive manner, providing a valuable reference to researchers and professionals.
Author: Olivério D.D. Soares Publisher: Springer Science & Business Media ISBN: 9400936095 Category : Science Languages : en Pages : 794
Book Description
Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.
Author: Daniel Malacara Publisher: John Wiley & Sons ISBN: 0471484040 Category : Science Languages : en Pages : 882
Book Description
The purpose of this third edition is to bring together in a single book descriptions of all tests carried out in the optical shop that are applicable to optical components and systems. This book is intended for the specialist as well as the non-specialist engaged in optical shop testing. There is currently a great deal of research being done in optical engineering. Making this new edition very timely.
Author: Yang Zhao
Author: Yang Zhao
Author: Christopher Taudt
Author: Kevin Harding
Author: Richard Leach
Author: Christopher Taudt
Author: Luigi Cocco
Author: M. Julian Chaubell
Author: Olivério D.D. Soares
Author: Daniel Malacara
Author: Michael O'Sullivan