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Author: S. V. Jagadeesh Chandra Publisher: LAP Lambert Academic Publishing ISBN: 9783843394222 Category : Languages : en Pages : 188
Book Description
High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications.
Author: S. V. Jagadeesh Chandra Publisher: LAP Lambert Academic Publishing ISBN: 9783843394222 Category : Languages : en Pages : 188
Book Description
High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications.
Author: Ashok Kumar Pandey Publisher: Springer Nature ISBN: 3031203534 Category : Technology & Engineering Languages : en Pages : 379
Book Description
This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
Author: Publisher: ScholarlyEditions ISBN: 1464963908 Category : Technology & Engineering Languages : en Pages : 3091
Book Description
Issues in Electronics Research and Application: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Electronics Research and Application. The editors have built Issues in Electronics Research and Application: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Electronics Research and Application in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Electronics Research and Application: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Author: Publisher: ScholarlyEditions ISBN: 1464990549 Category : Science Languages : en Pages : 4102
Book Description
Transition Elements—Advances in Research and Application: 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Transition Elements. The editors have built Transition Elements—Advances in Research and Application: 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Transition Elements in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Transition Elements—Advances in Research and Application: 2012 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Author: Publisher: ISBN: Category : Languages : en Pages : 23
Book Description
The design and construction of a planar magnetron-sputter deposition system with a beryllium chamber was accomplished to perform in-situ x-ray diffracUon growth study of refractory coatings. The deposition system was set on top of a laboratory 26 x-ray diffractometer. A two-dimensional array detector was interfaced for observation of the Debye nngs during growth. Integration along the 20 and directions allows fast phase and texture determination. The system was built to study effects of sputter deposition parameters on the structural properties of tantalum on steel, silicon, and glass substrates without exposing the system to atmosphere pressure. Two sputter depositions of tantalum films onto glass substrate in argon gas are reported here, one was deposited at 25-mm target-detector distance, 3.9 Pascal argon gas, and the other at 108-mm target-detector distance and 1.3 Pasc% argon gas. The first film grew to 250-nm in 39 minutes at an average growth rate of 6.4-nm/minute. It consisted of 45-nm of interface layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 15-nm growth of Beta-tantalum, and then followed by 190-nm growth of alpha-tantalum. From the full-width half maximum of the plot, it was determined that the p-tantalum region was 002 textured, and the a-tantalum region was 110 textured, and grew more textured with deposition time. The second film grew to 36-nm in 22 minutes at an average growth rate of 1 .6-nm/minute. It consisted of 31-nm of layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 5-nm of surface layer of p- and a-tantalum. Ex-situ grazing incidence x-ray diffraction performed on the film surface confirmed the in-situ results. Ex-situ pole figure analysis showed 110 fiber texture in a- tantalum, and highly 002 texture in p-tantalum.
Author: Wade H. Shafer Publisher: Springer Science & Business Media ISBN: 1475757824 Category : Science Languages : en Pages : 304
Book Description
Masters Theses in the Pure and Applied Sciences was first conceived, published, and dis seminated by the Center for lnformation and Numerica/ Data Analysis and Synthesis (C/NDAS) * at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the ac tivity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficia! to the academic and general scientific and technical community. After fi ve years of this joint undertaking we had concluded that it was in the interest of ali concerned if the printing and distribution of the volume were handled by an international publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and App/ied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. Ali back issues can also be ordered from Plenum. We have reported in Volume 21 (thesis year 1976) a total of 10,586 theses titles from 25 Canadian and 219 United States universities. We are sure that this broader base for theses titles reported will greatly enhance the value of this important annual reference work.
Author: Publisher: ScholarlyEditions ISBN: 146492077X Category : Science Languages : en Pages : 1063
Book Description
Transition Elements: Advances in Research and Application: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Transition Elements. The editors have built Transition Elements: Advances in Research and Application: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Transition Elements in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Transition Elements: Advances in Research and Application: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Author: S. V. Jagadeesh Chandra
Author: S. V. Jagadeesh Chandra
Author: Chandra Sekhar Musalikunta
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Author: Ashok Kumar Pandey
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Author: William Dickson Westwood
Author: Wade H. Shafer
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