Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication PDF Download

Author: P. Rai-Choudhury
Publisher: IET
ISBN: 9780852969113
Category : Technology & Engineering
Languages : en
Pages : 716

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Book Description
Contains useful process details, recipes, tables, charts and includes numerous device applications.

Author: P. Rai-Choudhury
Publisher: SPIE Press
ISBN: 9780819423788
Category : Technology & Engineering
Languages : en
Pages : 780

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Book Description
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

Author: P. Rai-Choudhury {u. a.
Publisher:
ISBN:
Category : Microfabrication
Languages : en
Pages :

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Book Description

Author: Prosenjit Rai-Choudhury
Publisher:
ISBN:
Category : Electronic book
Languages : en
Pages : 776

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Book Description

Author: P. Rai-Choudhury
Publisher: INSPEC, Incorporated
ISBN: 9780852969106
Category : Microfabrication
Languages : en
Pages : 0

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Book Description

Author: P. Rai-Choudhury
Publisher:
ISBN:
Category :
Languages : en
Pages : 692

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Book Description

Author: Sami Franssila
Publisher: John Wiley & Sons
ISBN: 1119991897
Category : Technology & Engineering
Languages : en
Pages : 534

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Book Description
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e

Author: D.M. Brunette
Publisher: Springer Science & Business Media
ISBN: 3642564860
Category : Technology & Engineering
Languages : en
Pages : 1019

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Book Description
Providing scientific and technical in-depth information in a clear format with a homogeneous structure, this text is suited for educational and self-teaching purposes as well as a reference on titanium for biomedical applications. It covers the whole area relevant to the use of titanium for implants, devices and instruments in medicine: material and surface science, physics, chemistry, biology, medicine, quality and regulatory aspects.

Author: Vijay K. Varadan
Publisher: John Wiley & Sons
ISBN: 0470846194
Category : Technology & Engineering
Languages : en
Pages : 406

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Book Description
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

Author: Andrzej Wieckowski
Publisher: CRC Press
ISBN: 0203912713
Category : Science
Languages : en
Pages : 970

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Book Description
Illustrating developments in electrochemical nanotechnology, heterogeneous catalysis, surface science and theoretical modelling, this reference describes the manipulation, characterization, control, and application of nanoparticles for enhanced catalytic activity and selectivity. It also offers experimental and synthetic strategies in nanoscale surface science. This standard-setting work clariefies several practical methods used to control the size, shape, crystal structure, and composition of nanoparticles; simulate metal-support interactions; predict nanoparticle behavior; enhance catalytic rates in gas phases; and examine catalytic functions on wet and dry surfaces.