Electrical Probes for Plasma Diagnostics PDF Download

Author: John Douglas Swift
Publisher: Iliffe
ISBN:
Category : Science
Languages : en
Pages : 350

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Book Description

Author: Orlando Auciello
Publisher: Academic Press
ISBN: 1483216241
Category : Science
Languages : en
Pages : 470

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Book Description
Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.

Author: R.J. Shul
Publisher: Springer Science & Business Media
ISBN: 9783540667728
Category : Science
Languages : en
Pages : 664

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Book Description
This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.

Author: Francis F. Chen
Publisher: Springer Science & Business Media
ISBN: 1461501814
Category : Science
Languages : en
Pages : 213

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Book Description
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Author: Anton Nikiforov
Publisher: BoD – Books on Demand
ISBN: 1838802495
Category : Science
Languages : en
Pages : 146

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Book Description
Plasma as the fourth state of matter is an ionized gas consisting of both negative and positive ions, electrons, neutral atoms, radicals, and photons. In the last few decades, atmospheric-pressure plasmas have started to attract increasing attention from both scientists and industry due to a variety of potential applications. Because of increasing interest in the topic, the focus of this book is on providing engineers and scientists with a fundamental understanding of the physical and chemical properties of different atmospheric-pressure plasmas via plasma diagnostic techniques and their applications. The book has been organized into two parts. Part I focuses on the latest achievements in advanced diagnostics of different atmospheric-pressure plasmas. Part II deals with applications of different atmospheric-pressure plasmas.

Author: Richard H. Huddlestone
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 652

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Book Description

Author: A. A. Ovsyannikov
Publisher: Cambridge Int Science Publishing
ISBN: 1898326231
Category : Lasers in plasma diagnostics
Languages : en
Pages : 585

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Book Description
The book contains the results of investigations of electro-physical, chemical, gas-dynamic and other processes in low-temperature plasma and their diagnostics. Both conventional spectral and optical methods of diagnostics and new and laser methods are examined, together with electrostatic probes for investigating rarefied and dense plasma, especially in the presence of chemical reactions. Problems of probe calorimetry of plasma flows are investigated and approaches to measuring the spatial and time characteristics of plasma outlined. Procedural problems of processing experimental data and automating diagnostic experiments are discussed.

Author: Michael Keidar
Publisher: Academic Press
ISBN: 0128137037
Category : Technology & Engineering
Languages : en
Pages : 587

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Book Description
Plasma Engineering, Second Edition, applies the unique properties of plasmas (ionized gases) to improve processes and performance over many fields, such as materials processing, spacecraft propulsion and nanofabrication. The book considers this rapidly expanding discipline from a unified standpoint, addressing fundamentals of physics and modeling, as well as new and real-word applications in aerospace, nanotechnology and bioengineering. This updated edition covers the fundamentals of plasma physics at a level suitable for students using application examples and contains the widest variety of applications of any text on the market, spanning the areas of aerospace engineering, nanotechnology and nanobioengineering. This is highly useful for courses on plasma engineering or plasma physics in departments of Aerospace Engineering, Electrical Engineering and Physics. It is also useful as an introduction to plasma engineering and its applications for early career researchers and practicing engineers. - Features new material relevant to application, including emerging areas of plasma nanotechnology and medicine - Contains a new chapter on plasma-based control, as well as a description of RF and microwave-based plasma applications, plasma lighting, reforming and other most recent application areas - Provides a technical treatment of the fundamental and engineering principles used in plasma applications

Author: André Anders
Publisher: Andre Anders
ISBN: 9783055012631
Category : Science
Languages : en
Pages : 280

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Book Description

Author: P.M. Chung
Publisher: Springer Science & Business Media
ISBN: 3642658865
Category : Science
Languages : en
Pages : 163

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Book Description
The electric probe has long been used as a fundamental diagnostic tool for measuring the local properties of a plasma. Since Langmuir first developed the electric-probe technique in 1924, probes have been used to measure electron densities and temperatures in a wide variety of gaseous ionized media, such as electric discharges, afterglows, ionizing shock waves, flames, MHD, and plasma-jet flows, reentry vehicle flow fields, and atmospheric and space plasmas. The first systematic account of modern theories of electriC-probe behavior was given by Chen (1965), who also provided practical information on experimental techniques. A subsequent survey by Swift and Schwar (1970), which was representative of results contained in the literature through 1969, included additional information on some of the modern theories and on practical details of probe utilization. The purpose of this volume is to supplement the previously mentioned two works by providing an account of a large body of the up-to-date informa tion available on electric probes, particularly in the areas of transitional and continuum-flow phenomena, and by offering, for all domains of probe appli cation, a critical appraisal of the more significant probe theories and experi mental investigations in the literature.