Compositional and Structural Analysis of Nitrogen Incorporated and Ion Implanted Diamond Thin Films PDF Download
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Author: Elias James Garratt Publisher: ISBN: Category : Languages : en Pages : 130
Book Description
Significant progress in area of nano-structured thin film systems has taken place in recent decades. In particular, diamond thin film systems are being widely studied for their wear resistant, optical and electronic properties. Of the various methods researchers use to modify the structure of such films, three techniques in particular are of interest due to their versatility: modification of the growth atmosphere, growth on metalized substrates, providing an interfacial layer, and modification through post-growth ion implantation. The aim of this study is to investigate the effects each has to the structure and composition of elements. Different techniques are applied in each section; nitrogen gas dilution in a microwave plasma CVD system, diamond deposition on a metal interfacial layer and ion implantation in thin nanocrystalline diamond film. The forms of nanocrystalline diamond film resulting from such modifications are investigated using advanced spectroscopic and spectrometric techniques, as well as mechanical testing and surface mapping. The impact of these characterizations will provide valuable perspective to researchers in materials science. Understanding the changes to the structure and properties of this class of thin films, which can be induced through various mechanisms, will allow future researchers to refine these films towards technological applications in areas of hard coatings, electronics and photonics.
Author: Elias James Garratt Publisher: ISBN: Category : Languages : en Pages : 130
Book Description
Significant progress in area of nano-structured thin film systems has taken place in recent decades. In particular, diamond thin film systems are being widely studied for their wear resistant, optical and electronic properties. Of the various methods researchers use to modify the structure of such films, three techniques in particular are of interest due to their versatility: modification of the growth atmosphere, growth on metalized substrates, providing an interfacial layer, and modification through post-growth ion implantation. The aim of this study is to investigate the effects each has to the structure and composition of elements. Different techniques are applied in each section; nitrogen gas dilution in a microwave plasma CVD system, diamond deposition on a metal interfacial layer and ion implantation in thin nanocrystalline diamond film. The forms of nanocrystalline diamond film resulting from such modifications are investigated using advanced spectroscopic and spectrometric techniques, as well as mechanical testing and surface mapping. The impact of these characterizations will provide valuable perspective to researchers in materials science. Understanding the changes to the structure and properties of this class of thin films, which can be induced through various mechanisms, will allow future researchers to refine these films towards technological applications in areas of hard coatings, electronics and photonics.
Author: M.S. Dresselhaus Publisher: Springer Science & Business Media ISBN: 3642771718 Category : Science Languages : en Pages : 212
Book Description
Carbon has always been a unique and intriguing material from a funda mental standpoint and, at the same time, a material with many technological uses. Carbon-based materials, diamond, graphite and their many deriva tives, have attracted much attention in recent years for many reasons. Ion implantation, which has proven to be most useful in modifying the near surface properties of many kinds of materials, in particular semiconductors, has also been applied to carbon-based materials. This has yielded, mainly in the last decade, many scientifically interesting and technologically impor tant results. Reports on these studies have been published in a wide variety of journals and topical conferences, which often have little disciplinary overlap, and which often address very different audiences. The need for a review to cover in an integrated way the various diverse aspects of the field has become increasingly obvious. Such a review should allow the reader to get an overview of the research that has been done thus far, to gain an ap preciation of the common features in the response of the various carbon to ion impact, and to become aware of current research oppor allotropes tunities and unresolved questions waiting to be addressed. Realizing this, and having ourselves both contributed to the field, we decided to write a review paper summarizing the experimental and theoretical status of ion implantation into diamond, graphite and related materials.
Author: Publisher: ISBN: Category : Languages : en Pages :
Book Description
We have investigated the synthesis of carbon-silicon-nitride compounds by ion implantation. In these experiments, 100 keV nitrogen ions were implanted into polycrystalline [beta]-SiC (cubic phase) at various substrate temperatures and ion doses. These thin films were characterized by x-ray diffraction with a position-sensitive detector, transmission electron microscopy with chemical analysis, and Rutherford backscattering spectroscopy. The as-implanted samples show a buried amorphous layer at a depth of 170 nm. Peak concentration of nitrogen saturates at approximately 45 at. % with doses above [approximately] 9.0 [times] 10[sup 17] N/cm[sup 2] at 860[degree]C. These results suggest formation of a new phase by nitrogen implantation into [beta]-SiC.
Author: Bharat Bhushan Publisher: Springer Science & Business Media ISBN: 3642311075 Category : Technology & Engineering Languages : en Pages : 1467
Book Description
Nanomaterials attract tremendous attention in recent researches. Although extensive research has been done in this field it still lacks a comprehensive reference work that presents data on properties of different Nanomaterials. This Handbook of Nanomaterials Properties will be the first single reference work that brings together the various properties with wide breadth and scope.
Author: Publisher: Academic Press ISBN: 0128202416 Category : Science Languages : en Pages : 318
Book Description
Diamond for Quantum Applications Part 1, Volume 103, the latest release in the Semiconductors and Semimetals series, highlights new advances in the field, with this new volume presenting interesting chapters on a variety of timely topics. Each chapter is written by an international board of authors. Provides the authority and expertise of leading contributors from an international board of authors Presents the latest release in the Semiconductors and Semimetals series Updated release includes the latest information on the use of diamonds for quantum applications
Author: Dale C. Jacobson Publisher: ISBN: Category : Science Languages : en Pages : 776
Book Description
Proceedings of the title symposium, held at the 1994 MRS Fall Meeting in Boston, 28 November-2 December 1994. Selected papers that were presented in both oral and poster sessions are divided into six topical groups: ion beam processing; defects and diffusion; ion-beam modification of polymers; analysis and characterization; sputtering; and laser-assisted and induced processes. Annotation copyright by Book News, Inc., Portland, OR
Author: Elias James Garratt
Author: Elias James Garratt
Author: M.S. Dresselhaus![Synthesis of (SiC)[sub 3]N[sub 4] Thin Films by Ion Implantation PDF](https://books.google.com/books/content/images/frontcover/_GPYjwEACAAJ?fife=w80-h100)
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Author: James Patrick Birrell
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Author: Bharat Bhushan
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Author: Dale C. Jacobson