CMOS Hotplate Chemical Microsensors PDF Download

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CMOS Hotplate Chemical Microsensors

CMOS Hotplate Chemical Microsensors PDF Author: Markus Graf
Publisher: Springer Science & Business Media
ISBN: 3540695621
Category : Technology & Engineering
Languages : en
Pages : 131

Book Description
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
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