Author: David Stephen Kinosky
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 244
Book Description
Characterization and reduction of defects in epitaxial Si and Si[subscript 1-x] Ge[subscript x]/Si films grown by remote plasma-enhanced chemical vapor deposition
Author: David Stephen Kinosky
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 244
Book Description
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 244
Book Description
Crystallographic and electrical characterization of epitaxial GE[subscript x]Si[subscript 1-x]/Si and in-situ doped films grown by remote plasma chemical vapor deposition
Author: Rong-Zhen Qian
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 396
Book Description
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 396
Book Description
Low temperature in situ clean and Si and Si[subscript 1-x] and Ge[subscript x] epitaxy by remote plasma-enhanced chemical vapor deposition
Author: Ting-Chen Hsu
Publisher:
ISBN:
Category : Silicon
Languages : en
Pages : 258
Book Description
Publisher:
ISBN:
Category : Silicon
Languages : en
Pages : 258
Book Description
Characterization of the electrical properties of epitaxial silicon films grown by remote plasma-enhanced chemical vapor deposition
Microstructural characterization of epitaxial silicon films grown by remote plasma-enhanced chemical vapor deposition
Author: Ting-Chen Hsu
Publisher:
ISBN:
Category : Microstructure
Languages : en
Pages : 230
Book Description
Publisher:
ISBN:
Category : Microstructure
Languages : en
Pages : 230
Book Description
In situ B-doped Si epitaxial films grown by remote plasma-enhanced chemical vapor deposition
Author: Joel Thornton Irby
Publisher:
ISBN:
Category : Silicon
Languages : en
Pages : 118
Book Description
Publisher:
ISBN:
Category : Silicon
Languages : en
Pages : 118
Book Description
Ge[subscript x]Si[subscript 1-x] epitaxial layers grown by rapid thermal processing chemical vapor deposition
Author: Kim Hsi-I Jung
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 118
Book Description
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 118
Book Description
Selective Area Chemical Vapor Deposition of Epitaxial Si[subscript 1-x]Ge[subscript X] Thin Films by the Alternating Cyclic Method
Author: Ravindra Govind Soman
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 304
Book Description
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 304
Book Description
Improving the electrical properties of in situ doped silicon films grown by remote plasma-enhanced chemical vapor deposition
Characterization of Epitaxial Semiconductor Films
Author: Henry Kressel
Publisher: Elsevier Science & Technology
ISBN:
Category : Science
Languages : en
Pages : 236
Book Description
Publisher: Elsevier Science & Technology
ISBN:
Category : Science
Languages : en
Pages : 236
Book Description