Transport Processes in Materials Processing Plasmas PDF Download

Author: Michael Duane Kilgore
Publisher:
ISBN:
Category : Microelectronics
Languages : en
Pages : 412

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Author: National Research Council
Publisher: National Academies Press
ISBN: 0309045975
Category : Technology & Engineering
Languages : en
Pages : 88

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Book Description
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Author: W.-J. Yang
Publisher: Elsevier
ISBN: 1483291324
Category : Science
Languages : en
Pages : 193

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Book Description
Motivated by international competition and an easy access to high-speed computers the manufacturing and materials processing industry has seen many changes in recent times. New techniques are constantly being devloped based on a broad range of basic sciences including physics, chemistry and particularly thermal-fluids sciences and kinetics. In order to produce and treat massive products, the industry is also in need of a very wide range of engineering knowledge and skill for integrating metallurgy, mechanics, electricity, transport phenomena, instrumentation and computer control. This monograph covers a part of these demands, namely by presenting the available knowledge on transport phenomena in manufacturing and materials processing. It is divided into four parts. Part I deals with the fundamentals of transport phenomena, including the transfer of momentum, energy, mass, electric and magnetic properties. Parts II and III are concerned with applications of the fundamentals in transport phenomena occurring in manufacturing and materials processing, respectively. Emphasis has been placed on common aspects of both discciplines, such as forming, machining, welding, casting, injection molding, surface processes, heating and cooling, solidification, crystal growth and diffusion. Part IV deals with beam technology and microgravity, two topics of current importance.

Author: Michael A. Lieberman
Publisher: John Wiley & Sons
ISBN: 1394245378
Category : Technology & Engineering
Languages : en
Pages : 837

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Book Description
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.

Author: Michael A. Lieberman
Publisher: John Wiley & Sons
ISBN: 0471724246
Category : Science
Languages : en
Pages : 795

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Book Description
A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Author: Michael A. Lieberman
Publisher: Wiley-Interscience
ISBN: 0471724246
Category : Science
Languages : en
Pages : 730

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Book Description
A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Author: V.M. Zhdanov
Publisher: CRC Press
ISBN: 1482265109
Category : Science
Languages : en
Pages : 292

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Book Description
Transport Processes in Multicomponent Plasma is a revised and updated version of the original Russian edition. The book examines transport phenomena in multicomponent plasma and looks at important issues such as partially ionized gases, molecular gas mixtures and methods of calculating kinetic coefficients. It makes a logical progression from simpl

Author: Jörg Florian Friedrich
Publisher: John Wiley & Sons
ISBN: 1119364760
Category : Science
Languages : en
Pages : 805

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Book Description
NONTHERMAL PLASMAS FOR MATERIALS PROCESSING This unique book covers the physical and chemical aspects of plasma chemistry with polymers and gives new insights into the interaction of physics and chemistry of nonthermal plasmas and their applications in materials science for physicists and chemists. The properties and characteristics of plasmas, elementary (collision) processes in the gas phase, plasma surface interactions, gas discharge plasmas and technical plasma sources, atmospheric plasmas, plasma diagnostics, polymers and plasmas, plasma polymerization, post-plasma processes, plasma, and wet-chemical processing, plasma-induced generation of functional groups, and the chemical reactions on these groups along with a few exemplary applications are discussed in this comprehensive but condensed state-of-the-art book on plasma chemistry and its dependence on plasma physics. While plasma physics, plasma chemistry, and polymer science are often handled separately, the aim of the authors is to harmoniously join the physics and chemistry of low-pressure and atmospheric-pressure plasmas with polymer surface chemistry and polymerization and to compare such chemistry with classic chemistry. Readers will find in these chapters Interaction of plasma physics and chemistry in plasmas and at the surface of polymers; Explanation and interpretation of physical and chemical mechanisms on plasma polymerization and polymer surface modification; Introduction of modern techniques in plasma diagnostics, surface analysis of solids, and special behavior of polymers on exposure to plasmas; Discussion of the conflict of energy-rich plasma species with permanent energy supply and the much lower binding energies in polymers and alternatives to avoid random polymer decomposition Technical applications such as adhesion, cleaning, wettability, textile modification, coatings, films, etc. New perspectives are explained about how to use selective and mild processes to allow post-plasma chemistry on non-degraded polymer surfaces. Audience Physicists, polymer chemists, materials scientists, industrial engineers in biomedicine, coatings, printing, etc.

Author: Radu Balescu
Publisher: North Holland
ISBN:
Category : Science
Languages : en
Pages : 516

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Author: A. T. Bell
Publisher: Elsevier
ISBN: 1483284492
Category : Science
Languages : en
Pages : 118

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Book Description
Plasma Chemistry - 2: Plasma Chemistry and Transport Phenomena in Thermal Plasmas presents the proceeding of the Second International Symposium on Plasma Chemistry, held in Rome, Italy, on September 18–23, 1975. This book discusses the thermodynamic state of chemically reacting plasmas, which are generally described by Pauli or Boltzmann kinetic equations. Organized into eight chapters, this compilation of papers begins with an overview of the influence of the plasma state by a superimposed laser radiation field. This text then examines the mechanisms of chemical transformations in electric discharges. Other chapters consider the successful exploitation of thermal plasmas in the field of high temperature chemistry. This book discusses as well the status of plasma processes involving mass transfer and heat, with reference to the processes of condensation, vaporization, and chemical reaction. The final chapter deals with plasma heating and spraying of various materials. This book is a valuable resource for chemists, metallurgists, and scientists.