Author: Hisham Z. MassoudPublisher:
ISBN:
Category : Science
Languages : en
Pages : 804
Book Description
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface-3, 1996
Author: Hisham Z. MassoudPublisher:
ISBN:
Category : Science
Languages : en
Pages : 804
Book Description
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface--4, 2000
Author: Hisham Z. MassoudPublisher:
ISBN:
Category : Nature
Languages : en
Pages : 562
Book Description
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Author: M. Jamal DeenPublisher: The Electrochemical Society
ISBN: 9781566771375
Category : Science
Languages : en
Pages : 610
Book Description
Fundamental Aspects of Silicon Oxidation
Author: Yves J. ChabalPublisher: Springer Science & Business Media
ISBN: 3642567118
Category : Technology & Engineering
Languages : en
Pages : 269
Book Description
Discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.
Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Author: Eric GarfunkelPublisher: Springer Science & Business Media
ISBN: 9401150087
Category : Technology & Engineering
Languages : en
Pages : 503
Book Description
An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
Passivity of Metals and Semiconductors
Author: Michael Brian IvesPublisher: The Electrochemical Society
ISBN: 9781566773041
Category : Science
Languages : en
Pages : 1000
Book Description
Silicon Materials Science and Technology
Author: Semiconductor Silicon 2002
Author: Howard R. HuffPublisher: The Electrochemical Society
ISBN: 9781566773744
Category : Science
Languages : en
Pages : 650
Book Description
Silicon-Based Material and Devices, Two-Volume Set
Author: Hari Singh NalwaPublisher: Academic Press
ISBN: 0080541232
Category : Technology & Engineering
Languages : en
Pages : 646
Book Description
This book covers a broad spectrum of the silicon-based materials and their device applications. This book provides a broad coverage of the silicon-based materials including different kinds of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. This two-volume set offers a selection of timely topics on silicon materials namely those that have been extensively used for applications in electronic and photonic technologies. The extensive reference provides broad coverage of silicon-based materials, including different types of silicon-related materials, their processing, spectroscopic characterization, physical properties, and device applications. Fourteen chapters review the state of the art research on silicon-based materials and their applications to devices. This reference contains a subset of articles published in AP's recently released Handbook of Advanced Electronic and Photonic Materials and Devices ( 2000, ISBN 012-5137451, ten volumes) by Dr. Hari Nalwa. This two-volume work strives to present a highly coherent coverage of silicon-based material uses in the vastly dynamic arena of silicon chip research and technology. Key Features * Covers silicon-based materials and devices * Include types of materials, their processing, fabrication, physical properties and device applications * Role of silicon-based materials in electronic and photonic technology * A very special topic presented in a timely manner and in a format
Handbook of Ellipsometry
Author: Harland TompkinsPublisher: William Andrew
ISBN: 0815517475
Category : Science
Languages : en
Pages : 887
Book Description
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.