The Air Force Institute of Technology (AFIT) Micro Electro-Mechanical Systems (MEMS) Interferometric Gyroscope (MiG) PDF Download
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Author: Jeremy P. Stringer Publisher: ISBN: 9781423536017 Category : Languages : en Pages : 153
Book Description
With the invention of Micro Electro-Mechanical Systems (MEMS) it has become possible to fabricate micro-inertial sensors. These new sensors have application in creating autonomous guided weapons systems. New technologies like Micro Unmanned Aerial Vehicles (UAVs), which cannot use conventional inertial sensors, rely on technologies like micro-inertial sensors to operate. Also, such sensors have the capability to reduce both power and space consumption on conventional aircraft. This technology is not yet mature, and current micro- inertial sensors do not have the accuracy required for highly precise navigation. To try to increase the accuracy of micro-inertial sensors, researchers are turning toward micro-optical gyroscopes. Creating a working micro-optical gyroscope is a difficult proposition as their small size precludes micro-optical gyroscopes from having large enough path lengths to sense useful rotation rates. Techniques need to be developed to create micro-optical gyroscopes with path lengths long enough to sense navigation grade rotation rates. This research proposes a new type of MEMS optical gyroscope. The device, called the AFIT MiG is an open loop Sagnac interferometer on a MEMS die. Mirrors are placed on the die to spiral light inward from the outside to the center of the die thereby increasing the optical path length of the device. When the AFIT MiG was simulated using flight profiles generated in MATLAB, the optical path length of the device was long enough to measure rotation rates, which were greater in strength than the noise inherent in the measurement. This research also shows the ability to propagate light around an open loop MEMS interferometer with enough signal strength at the detector to measure.
Author: Jeremy P. Stringer Publisher: ISBN: 9781423536017 Category : Languages : en Pages : 153
Book Description
With the invention of Micro Electro-Mechanical Systems (MEMS) it has become possible to fabricate micro-inertial sensors. These new sensors have application in creating autonomous guided weapons systems. New technologies like Micro Unmanned Aerial Vehicles (UAVs), which cannot use conventional inertial sensors, rely on technologies like micro-inertial sensors to operate. Also, such sensors have the capability to reduce both power and space consumption on conventional aircraft. This technology is not yet mature, and current micro- inertial sensors do not have the accuracy required for highly precise navigation. To try to increase the accuracy of micro-inertial sensors, researchers are turning toward micro-optical gyroscopes. Creating a working micro-optical gyroscope is a difficult proposition as their small size precludes micro-optical gyroscopes from having large enough path lengths to sense useful rotation rates. Techniques need to be developed to create micro-optical gyroscopes with path lengths long enough to sense navigation grade rotation rates. This research proposes a new type of MEMS optical gyroscope. The device, called the AFIT MiG is an open loop Sagnac interferometer on a MEMS die. Mirrors are placed on the die to spiral light inward from the outside to the center of the die thereby increasing the optical path length of the device. When the AFIT MiG was simulated using flight profiles generated in MATLAB, the optical path length of the device was long enough to measure rotation rates, which were greater in strength than the noise inherent in the measurement. This research also shows the ability to propagate light around an open loop MEMS interferometer with enough signal strength at the detector to measure.
Author: Mario N. Armenise Publisher: Springer Science & Business Media ISBN: 3642154948 Category : Technology & Engineering Languages : en Pages : 123
Book Description
This monograph collects and critically reviews the main results obtained by the scientific community in gyroscope technologies research field. It describes architectures, design techniques and fabrication technology of angular rate sensors proposed in literature. MEMS, MOEMS, optical and mechanical technologies are discussed together with achievable performance. The book also consideres future research trends aimed to cover special applications. The book is intended for researchers and Ph.D. students interested in modelling, design and fabrication of gyros. The book may be a useful education support in some university courses focused on gyro technologies.
Author: Cenk Acar Publisher: Springer Science & Business Media ISBN: 0387095365 Category : Technology & Engineering Languages : en Pages : 262
Book Description
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Author: Haoran Wen Publisher: Springer Nature ISBN: 3030254704 Category : Technology & Engineering Languages : en Pages : 127
Book Description
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.
Author: Nadim Maluf Publisher: Artech House ISBN: 9781580535915 Category : Technology & Engineering Languages : en Pages : 312
Book Description
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Author: Jeremy P. Stringer
Author: Jeremy P. Stringer
Author: Mario N. Armenise
Author: Jeremy Paul Stringer
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Author: Cenk Acar
Author: Haoran Wen
Author: Richard Michael Kuhns
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Author: Nadim Maluf
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