Author: Zuoying Lisa ZhangPublisher:
ISBN:
Category :
Languages : en
Pages : 166
Book Description
Submicron Three-dimensional Single-crystal Electro-mechanical Structures and Actuators Integrated with Field Emitters for Micro-machined Vacuum Electronics Applications
Author: Zuoying Lisa ZhangThree-dimensional Single Crystal Silicon Micromachining
Author: Wolfgang Maximilian Josef HofmannPublisher:
ISBN:
Category : Micromachining
Languages : en
Pages : 502
Book Description
Integrated Three-dimensional Processing for Novel Micro Electro Mechanical Systems
Author: Liang-Yuh ChenOptimal Design and Fabrication of Micro-electro-mechanical Structures - with Applications to Comb Drives
Author: Wenjing YePublisher:
ISBN:
Category : Electronic apparatus and appliances
Languages : en
Pages : 290
Book Description
Microlithography and Metrology in Micromachining
Author: Micro-optics/micromechanics and Laser Scanning and Shaping
Author: M. Edward MotamediPublisher:
ISBN:
Category : Computers
Languages : en
Pages : 504
Book Description
Wavelength-tunable Fiber-optic Mems Scanning Fabry-Pérot Interferometer
Author: Ali JazairyPublisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 282
Book Description
Single Mask, Multiple Level Single Crystal Silicon Processes
Author: Kanakasabapathi SubramanianPublisher:
ISBN:
Category :
Languages : en
Pages : 678
Book Description
Microelectromechanical Systems
Author: National Research CouncilPublisher: National Academies Press
ISBN: 0309174341
Category : Technology & Engineering
Languages : en
Pages : 75
Book Description
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Micro Electronic and Mechanical Systems
Author: Zheng Yun ManPublisher:
ISBN: 9781681175034
Category :
Languages : en
Pages : 288
Book Description
Micro-electromechanical systems (MEMS) is a technology that combines computers with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators embedded in semiconductor chips. Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. MEMS are already used as accelerometers in automobile air-bags. They have replaced a less reliable device at lower cost and show promise of being able to inflate a bag not only on the basis of sensed deceleration but also on the basis of the size of the person they are protecting. Basically, a MEMS device contains micro-circuitry on a tiny silicon chip into which some mechanical device such as a mirror or a sensor has been manufactured. Potentially, such chips can be built in large quantities at low cost, making them costeffective for many uses.