Author: D. W. Ernie
Publisher:
ISBN:
Category : Glow discharges
Languages : en
Pages : 107
Book Description
Radio frequency discharges currently play a major role in the fabrication of microelectronic devices. This manuscript reports on theoretical and experimental studies undertaken in an effort to develop a better understanding of the underlying gas discharge physics occuring in these discharges. An equivalent circuit model was developed for a planar rf reactor based on the physical properties of the plasma sheath. This model shows that the waveforms of the potentials across the plasma sheaths are highly nonlinear and agree with previously reported measurements. These waveforms were subsequently incorporated into a model for the energy distribution of ions bombarding the electrode surfaces in low pressure rf reactors. Numerical calculations based on this model show the ion bombardment energy distribution is bimodal and skewed toward lower impact energies. Experimental measurements were also performed on the ion bombardment energy distribution in a planar rf reactor. The results of these measurements agree with the model predictions at low pressure and give information at higher pressures about the effects of collisions on the distribution, which agree with previous studies. The importance of negative ions in a discharge through an electronegative gas was investigated by the development of a collisionless plasma sheath model for such a discharge. A sheath criterion was derived and used to determine the effects of negative ions on the sheath properties.
Studies of the Volume and Plasma Sheath Properties of Radio Frequency Discharges
Author: D. W. Ernie
Publisher:
ISBN:
Category : Glow discharges
Languages : en
Pages : 107
Book Description
Radio frequency discharges currently play a major role in the fabrication of microelectronic devices. This manuscript reports on theoretical and experimental studies undertaken in an effort to develop a better understanding of the underlying gas discharge physics occuring in these discharges. An equivalent circuit model was developed for a planar rf reactor based on the physical properties of the plasma sheath. This model shows that the waveforms of the potentials across the plasma sheaths are highly nonlinear and agree with previously reported measurements. These waveforms were subsequently incorporated into a model for the energy distribution of ions bombarding the electrode surfaces in low pressure rf reactors. Numerical calculations based on this model show the ion bombardment energy distribution is bimodal and skewed toward lower impact energies. Experimental measurements were also performed on the ion bombardment energy distribution in a planar rf reactor. The results of these measurements agree with the model predictions at low pressure and give information at higher pressures about the effects of collisions on the distribution, which agree with previous studies. The importance of negative ions in a discharge through an electronegative gas was investigated by the development of a collisionless plasma sheath model for such a discharge. A sheath criterion was derived and used to determine the effects of negative ions on the sheath properties.
Publisher:
ISBN:
Category : Glow discharges
Languages : en
Pages : 107
Book Description
Radio frequency discharges currently play a major role in the fabrication of microelectronic devices. This manuscript reports on theoretical and experimental studies undertaken in an effort to develop a better understanding of the underlying gas discharge physics occuring in these discharges. An equivalent circuit model was developed for a planar rf reactor based on the physical properties of the plasma sheath. This model shows that the waveforms of the potentials across the plasma sheaths are highly nonlinear and agree with previously reported measurements. These waveforms were subsequently incorporated into a model for the energy distribution of ions bombarding the electrode surfaces in low pressure rf reactors. Numerical calculations based on this model show the ion bombardment energy distribution is bimodal and skewed toward lower impact energies. Experimental measurements were also performed on the ion bombardment energy distribution in a planar rf reactor. The results of these measurements agree with the model predictions at low pressure and give information at higher pressures about the effects of collisions on the distribution, which agree with previous studies. The importance of negative ions in a discharge through an electronegative gas was investigated by the development of a collisionless plasma sheath model for such a discharge. A sheath criterion was derived and used to determine the effects of negative ions on the sheath properties.
Energy Research Abstracts
Scientific and Technical Aerospace Reports
Physics of Radio-Frequency Plasmas
Author: Pascal Chabert
Publisher: Cambridge University Press
ISBN: 9780521763004
Category : Science
Languages : en
Pages : 392
Book Description
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Publisher: Cambridge University Press
ISBN: 9780521763004
Category : Science
Languages : en
Pages : 392
Book Description
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Demand Bibliography
ERDA Energy Research Abstracts
Technical Reports Awareness Circular : TRAC.
Characterization of Plasma-Enhanced CVD Processes: Volume 165
Author: Gerald Lucovsky
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 280
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Publisher: Mrs Proceedings
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 280
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Government Reports Annual Index
Author:
Publisher:
ISBN:
Category : Government reports announcements & index
Languages : en
Pages : 1364
Book Description
Publisher:
ISBN:
Category : Government reports announcements & index
Languages : en
Pages : 1364
Book Description