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Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Paul S. Ho
Publisher: American Institute of Physics
ISBN:
Category : Science
Languages : en
Pages : 250

Book Description
This symposium focuses on new developments in the fields of experimental and theoretical nuclear physics, including nuclear dynamics, nuclear structure including hypernuclei, nuclear matter, nuclear astrophysics, applications. The participants also reported on the innovative instrumentation, including future large-scale facility both in Japan and Italy that will be essential for future studies.

Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Paul S. Ho
Publisher: American Institute of Physics
ISBN:
Category : Science
Languages : en
Pages : 250

Book Description
This symposium focuses on new developments in the fields of experimental and theoretical nuclear physics, including nuclear dynamics, nuclear structure including hypernuclei, nuclear matter, nuclear astrophysics, applications. The participants also reported on the innovative instrumentation, including future large-scale facility both in Japan and Italy that will be essential for future studies.

Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Ehrenfried Zschech
Publisher: American Institute of Physics
ISBN:
Category : Science
Languages : en
Pages : 394

Book Description
These proceedings present current research on issues related to stress-induced phenomena in on-chip metal interconnects and solder joints. The volume will appeal to scientists, engineers, graduate students interested in research and development of microelectronic devices as well as technology integration, and semiconductor industry professionals and equipment suppliers.

Stress-induced Phenomena in Metallization

Stress-induced Phenomena in Metallization PDF Author: American Institute of Physics
Publisher:
ISBN:
Category : Aluminum films
Languages : en
Pages :

Book Description


Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Shinichi Ogawa
Publisher: American Institute of Physics
ISBN:
Category : Science
Languages : en
Pages : 220

Book Description
Kyoto, Japan, 4-7 April 2007

Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Ehrenfried Zschech
Publisher: American Institute of Physics
ISBN: 9780735403109
Category : Science
Languages : en
Pages : 392

Book Description
These proceedings present current research on issues related to stress-induced phenomena in on-chip metal interconnects and solder joints. The volume will appeal to scientists, engineers, graduate students interested in research and development of microelectronic devices as well as technology integration, and semiconductor industry professionals and equipment suppliers.

Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: Ehrenfried Zschech
Publisher: American Inst. of Physics
ISBN: 9780735408555
Category : Technology & Engineering
Languages : en
Pages : 0

Book Description
One current challenge to micro- and nanoelectronics is the understanding of stress-related phenomena in metallization. Stresses arising in on-chip and 3D metal interconnects and in the surrounding materials due to thermal mismatch, microstructure changes or process integration as well as electromigration can lead to degradation and failure of microelectronic products. The implementation of low dielectric constant materials into the inlaid copper backend-of-line process has brought new challenges for process integration and reliability. Understanding stress-related phenomena in new materials used for 3D integration and packaging, particularly using through silicon vias and microbumps, is critical for future microelectronic products. The Proceedings summarize new research results and advances in basic understanding of stress-induced phenomena in metallization. In addition to experimental studies, modelling and simulation capabilities are demonstrated to evaluate the effect of stress on product performance and reliability. Stress-related phenomena in 3D IC interconnects are covered too.

Stress-induced Phenomena in Metallization

Stress-induced Phenomena in Metallization PDF Author: No
Publisher: American Institute of Physics
ISBN: 9781563960826
Category : Science
Languages : en
Pages : 280

Book Description


Stress-induced Phenomena in Metallization

Stress-induced Phenomena in Metallization PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 204

Book Description


Stress-Induced Phenomena in Metallization

Stress-Induced Phenomena in Metallization PDF Author: P. S. Ho
Publisher: A I P Press
ISBN:
Category : Science
Languages : en
Pages : 300

Book Description
Continuing the spirit of the previous workshops, the proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. The current technology drive to implement low dielectric constant materials into copper metallization has brought new and significant challenges in process integration and reliability. Stresses arising in metallizations and surrounding dielectric structures due to thermal mismatch, electromigration, microstructure changes or process integration can lead to damage and failure of interconnect structures. Understanding stress-related phenomena in new materials and structures becomes critical for reliability improvement and metallization development. This is reflected in the papers included in the proceedings, which report results on electromigration, thermal stresses and void formation in copper-low k interconnect structures. The book also includes new results on fracture of low k dielectric structures, an important research area for reliability and integration of copper metallization.

Stress-induced Phenomena in Metallization

Stress-induced Phenomena in Metallization PDF Author: Paul S. Ho
Publisher:
ISBN:
Category : Aluminum films
Languages : en
Pages : 302

Book Description