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Author: Publisher: ISBN: Category : Optical instruments Languages : en Pages : 1142
Book Description
Publishes papers reporting on research and development in optical science and engineering and the practical applications of known optical science, engineering, and technology.
Author: P. Rai-Choudhury Publisher: SPIE Press ISBN: 9780819423795 Category : Technology & Engineering Languages : en Pages : 706
Book Description
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.