Spectroscopic Diagnostics to Support Advanced Microelectronic Fabrication Techniques PDF Download
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Author: J. C. Wormhoudt Publisher: ISBN: Category : Languages : en Pages : 34
Book Description
This is the first annual report on a program to develop laser spectroscopic diagnostics for detection of gas phase species important in fabrication processes for advanced semiconductor materials. It has two objectives, to obtain quantitative spectroscopic data for these molecules, and to apply diagnostics to model fabrication systems. This report summarizes progress in the areas of investigation identified in the first year: chlorine atom detection using an infrared tunable diode laser, which will also be used to instrument a plasma etching reactor, and infrared and laser induced fluorescence spectroscopic studies of SiF2, CF2, and SiH2. Keywords include: Diagnostic Instrumentation, Electronic Materials, Infrared Absorption, Lasers, Laser-Induced Fluorescence, Microelectronic Fabrication, Semiconductor Processing, and Spectroscopy.
Author: J. C. Wormhoudt Publisher: ISBN: Category : Languages : en Pages : 34
Book Description
This is the first annual report on a program to develop laser spectroscopic diagnostics for detection of gas phase species important in fabrication processes for advanced semiconductor materials. It has two objectives, to obtain quantitative spectroscopic data for these molecules, and to apply diagnostics to model fabrication systems. This report summarizes progress in the areas of investigation identified in the first year: chlorine atom detection using an infrared tunable diode laser, which will also be used to instrument a plasma etching reactor, and infrared and laser induced fluorescence spectroscopic studies of SiF2, CF2, and SiH2. Keywords include: Diagnostic Instrumentation, Electronic Materials, Infrared Absorption, Lasers, Laser-Induced Fluorescence, Microelectronic Fabrication, Semiconductor Processing, and Spectroscopy.
Author: G.M. Crean Publisher: Elsevier ISBN: 0444596917 Category : Science Languages : en Pages : 352
Book Description
There is a growing awareness that the successful implementation of novel material systems and technology steps in the fabrication of microelectronic and optoelectronic devices, is critically dependent on the understanding and control of the materials, the process steps and their interactions. The contributions in this volume demonstrate that characterisation and analysis techniques are an essential support mechanism for research in these fields. Current major research themes are reviewed both in the development and application of diagnostic techniques for advanced materials analysis and fabrication process control. Two distinct trends are elucidated: the emergence and evaluation of sophisticated in situ optical diagnostic techniques such as photoreflectance and spectroellipsometry and the industrial application of ultra-high sensitivity chemical analysis techniques for contamination monitoring. The volume will serve as a useful and timely overview of this increasingly important field.
Author: United States. Congress. House. Committee on Appropriations. Subcommittee on Energy and Water Development Publisher: ISBN: Category : Federal aid to energy development Languages : en Pages : 1716
Author: J. C. Wormhoudt
Author: J. C. Wormhoudt
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Author: G.M. Crean
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Author: United States. National Aeronautics and Space Administration
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Author: United States. Congress. House. Committee on Appropriations. Subcommittee on Energy and Water Development