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Author: Jeremiah D. Hogan Publisher: Wiley-VCH ISBN: Category : Science Languages : en Pages : 224
Book Description
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.
Author: Jeremiah D. Hogan Publisher: Wiley-VCH ISBN: Category : Science Languages : en Pages : 224
Book Description
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.
Author: William M. Geiger Publisher: John Wiley & Sons ISBN: 1118642570 Category : Science Languages : en Pages : 309
Book Description
Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis. Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls. Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications. The book begins with the historical development of gas analysis and then focuses on particular subjects or techniques such as: Metals sampling and ICP-MS analysis Improvements in FTIR spectroscopy Water vapor analysis techniques New infrared laser absorption spectroscopy approaches GC/MS, GC/AED, and GC-ICP-MS techniques Gas chromatography columns Atmospheric pressure ionization mass spectrometry Lastly, the book examines gas mixtures and standards that are critical for instrument calibration. There are also two appendices offering information on fittings and material compatibility. With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques.
Author: John Swinley Publisher: Elsevier ISBN: 0128188898 Category : Science Languages : en Pages : 440
Book Description
A Practical Gas Analysis by Gas Chromatography provides a detailed overview of the most important aspects of gas analysis by gas chromatography (GC) for both the novice and expert. Authors John Swinley and Piet de Coning provide the necessary information on the selection of columns and components, thus allowing the reader to assemble custom gas analysis systems for specific needs. The book brings together a wide range of disparate literature on this technique that will fill a crucial gap for those who perform different types of research, including lab operators, separation scientists, graduate students and academic researchers. This highly practical, up-to-date reference can be consulted in the lab to guide key decisions about proper setup, hardware and software selection, calibration, analysis, and more, allowing researchers to avoid the common pitfalls caused by incorrect infrastructure. Shows, in detail, how valve configurations work, allowing readers to understand the building blocks of extremely complex systems Presents the complete infrastructure for setting up a gas analysis laboratory in a single source Includes a full chapter on practical analytical systems for analyzing various gas mixtures
Author: Jeremiah D. Hogan
Author: Jeremiah D. Hogan
Author: Jorge E. Pérez
Author: William M. Geiger
Author: Hogan JD Ed
Author: Michael Tang
Author: John Swinley
Author: Allen J. Metzler
Author: Scott Specialty Gases, Inc
Author: Scott Specialty Gases, Inc
Author: United States. Department of the Air Force