Author: Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 330
Book Description
Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 3-6, 1996
Author: Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 330
Book Description
Microelectromechanical Systems
Author: National Research CouncilPublisher: National Academies Press
ISBN: 0309059801
Category : Technology & Engineering
Languages : en
Pages : 76
Book Description
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Author: P. Rai-ChoudhuryPublisher: SPIE Press
ISBN: 9780819423795
Category : Technology & Engineering
Languages : en
Pages : 706
Book Description
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Micromachined Devices and Components
Author: Micro Electro Mechanical Systems
Author: Publisher: Institute of Electrical & Electronics Engineers(IEEE)
ISBN:
Category : Science
Languages : en
Pages : 702
Book Description
Proceedings of SPIE--the International Society for Optical Engineering
Author: Selected Papers on Optical MEMS
Author: Victor M. BrightPublisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 654
Book Description
A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Author: 
Author: 
Author: