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Author: Marc J. Madou Publisher: CRC Press ISBN: 1420055119 Category : Technology & Engineering Languages : en Pages : 658
Book Description
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: Crystallography and the crystalline materials used in many semiconductor devices Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS Single crystal Si properties that conspire to make Si so important Optical properties of bulk 3D metals, insulators, and semiconductors Effects of electron and photon confinement in lower dimensional structures How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics Metamaterials and how they could make for perfect lenses, changing the photonic field forever Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior Electromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
Author: Marc J. Madou Publisher: CRC Press ISBN: 1420055119 Category : Technology & Engineering Languages : en Pages : 658
Book Description
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: Crystallography and the crystalline materials used in many semiconductor devices Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS Single crystal Si properties that conspire to make Si so important Optical properties of bulk 3D metals, insulators, and semiconductors Effects of electron and photon confinement in lower dimensional structures How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics Metamaterials and how they could make for perfect lenses, changing the photonic field forever Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior Electromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
Author: Marc J. Madou Publisher: CRC Press ISBN: 1482274663 Category : Technology & Engineering Languages : en Pages : 1983
Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author: James D. Patterson Publisher: Springer ISBN: 3319753223 Category : Science Languages : en Pages : 973
Book Description
While the standard solid state topics are covered, the basic ones often have more detailed derivations than is customary (with an empasis on crystalline solids). Several recent topics are introduced, as are some subjects normally included only in condensed matter physics. Lattice vibrations, electrons, interactions, and spin effects (mostly in magnetism) are discussed the most comprehensively. Many problems are included whose level is from "fill in the steps" to long and challenging, and the text is equipped with references and several comments about experiments with figures and tables.
Author: Marc J. Madou Publisher: CRC Press ISBN: 1420055194 Category : Technology & Engineering Languages : en Pages : 672
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Author: Marc J. Madou Publisher: CRC Press ISBN: 142005516X Category : Technology & Engineering Languages : en Pages : 652
Book Description
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology
Author: M Feldman Publisher: Woodhead Publishing ISBN: 0857098756 Category : Technology & Engineering Languages : en Pages : 599
Book Description
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics
Author: Petr Ptáček Publisher: BoD – Books on Demand ISBN: 9535122657 Category : Science Languages : en Pages : 516
Book Description
Apatite-type minerals and their synthetic analogues are of interest of many industrial branches and scientific disciplines including material sciences, chemical industry, agriculture, geology, medicine and dentistry. This book provides a basic overview of general knowledges of this topic in order to provide the comprehensive survey from a scientific and technological perspective. The book is divided into 10 chapters, which are devoted to the structure and properties of minerals from the supergroup of apatite, experimental techniques of preparation and characterization of synthetic analogues of apatite minerals, substitution in the structure of apatite as well as utilization of these materials in wide range of common and special advanced applications in industry, material sciences and research. Additionally, the phosphate rocks, their classification, geological role, mining and beneficiation of phosphate ore, production of elemental phosphorus, phosphoric acid and fertilizers are also described. Although this book is meant for chemist, material scientist and research engineers, the individual chapters contain theoretical background, historical aspects as well as examples of synthetic and analytical methods which may be also interesting for students and non-expert readers as well.
Author: Henrik Bruus Publisher: Oxford University Press ISBN: 0191528587 Category : Science Languages : en Pages :
Book Description
Microfluidics is a young and rapidly expanding scientific discipline, which deals with fluids and solutions in miniaturized systems, the so-called lab-on-a-chip systems. It has applications in chemical engineering, pharmaceutics, biotechnology and medicine. As the lab-on-a-chip systems grow in complexity, a proper theoretical understanding becomes increasingly important. The basic idea of the book is to provide a self-contained formulation of the theoretical framework of microfluidics, and at the same time give physical motivation and examples from lab-on-a-chip technology. After three chapters introducing microfluidics, the governing equations for mass, momentum and energy, and some basic flow solutions, the following 14 chapters treat hydraulic resistance/compliance, diffusion/dispersion, time-dependent flow, capillarity, electro- and magneto-hydrodynamics, thermal transport, two-phase flow, complex flow patterns and acousto-fluidics, as well as the new fields of opto- and nano-fluidics. Throughout the book simple models with analytical solutions are presented to provide the student with a thorough physical understanding of order of magnitudes and various selected microfluidic phenomena and devices. The book grew out of a set of well-tested lecture notes. It is with its many pedagogical exercises designed as a textbook for an advanced undergraduate or first-year graduate course. It is also well suited for self-study.
Author: Peter Rodgers Publisher: World Scientific ISBN: 9814466867 Category : Technology & Engineering Languages : en Pages : 367
Book Description
This book contains 35 review articles on nanoscience and nanotechnology that were first published in Nature Nanotechnology, Nature Materials and a number of other Nature journals. The articles are all written by leading authorities in their field and cover a wide range of areas in nanoscience and technology, from basic research (such as single-molecule devices and new materials) through to applications (in, for example, nanomedicine and data storage).
Author: Marc J. Madou
Author: Marc J. Madou
Author: Marc J. Madou
Author: Y.-L. Wang
Author: James D. Patterson
Author: Marc J. Madou
Author: Marc J. Madou
Author: M Feldman
Author: Petr Ptáček
Author: Henrik Bruus
Author: Peter Rodgers