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Soft x-rays and extreme ultraviolet radiation

Soft x-rays and extreme ultraviolet radiation PDF Author: David Attwood
Publisher:
ISBN: 9781139641326
Category :
Languages : en
Pages : 470

Book Description
This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
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