Single Mask, Multiple Level Single Crystal Silicon Processes: MEMS Out-of-plane Actuators and Three-dimensional Wire Arrays PDF Download
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Author: Prem Pal Publisher: CRC Press ISBN: 9814613738 Category : Science Languages : en Pages : 425
Book Description
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Author: Kourosh Khosraviani Publisher: ISBN: Category : Detectors Languages : en Pages : 88
Book Description
Micro-Electro-Mechanical-Systems (MEMS) take advantage of a wide range of very reliable, and well established existing microelectronics fabrication techniques. Due to the planar nature of these techniques, out-of-plane MEMS devices must be fabricated in-plane and assembled afterwards in order to create out-of-plane three-dimensional structures. Out-of-plane microstructures extend the design space of the MEMS based devices and overcome many limitations of the in-plane processing. Nevertheless, several issues have to be addressed in order to integrate an out-of-plane structure into an existing process. These include robustness, yield, reliability, assembly technique, packaging and so forth. In this thesis we introduce an inorganic based post-CMOS compatible process upon which the mechanical structure for out-of-plane micro sensors and actuators can be fabricated. The hinge-less out-of-plane microstructures (compliant mechanisms) are mechanically robust structures that provide reliable electrical connection to the devices that are rotated out-of-plane. Fabrication of these structures by inorganic materials introduces several challenges to the process that have to be addressed. Fabrication of micromechanical structures by silicon micromachining could significantly modify the topography of the substrate, which results in non-planarity and degradation of the mechanical performance of the structures. On the other hand, the residual stress of the structural layer has profound effect on the final shape of the out-of-plane microstructures. In particular, stress non-uniformity can cause severe structural deformation which deteriorates the device performance (e.g. linearity, sensitivity, and dynamic range), or can make the device assembly difficult or sometimes impossible. To overcome the topography issue related to the freestanding structures and to control the stress profile of their structural layer, we have developed two novel techniques. The first technique is an unconventional planarization process that is achieved by modifying the etch property of the sacrificial layer. The second technique compensates the stress non-uniformity across the thickness of the sputter-deposited films by in-situ control of the film property during the deposition process. The practicality and versatility of these techniques has been illustrated through the fabrication of a functional out-of-plane three-axis thermal accelerometer, which has a significant and growing share in the consumer electronics market.
Author: Xiujun James Li Publisher: Woodhead Publishing ISBN: 9780857096975 Category : Technology & Engineering Languages : en Pages : 0
Book Description
Microfluidics or lab-on-a-chip (LOC) is an important technology suitable for numerous applications from drug delivery to tissue engineering. Microfluidic devices for biomedical applications discusses the fundamentals of microfluidics and explores in detail a wide range of medical applications. The first part of the book reviews the fundamentals of microfluidic technologies for biomedical applications with chapters focussing on the materials and methods for microfabrication, microfluidic actuation mechanisms and digital microfluidic technologies. Chapters in part two examine applications in drug discovery and controlled-delivery including micro needles. Part three considers applications of microfluidic devices in cellular analysis and manipulation, tissue engineering and their role in developing tissue scaffolds and stem cell engineering. The final part of the book covers the applications of microfluidic devices in diagnostic sensing, including genetic analysis, low-cost bioassays, viral detection, and radio chemical synthesis. Microfluidic devices for biomedical applications is an essential reference for medical device manufacturers, scientists and researchers concerned with microfluidics in the field of biomedical applications and life-science industries.
Author: Kanakasabapathi Subramanian
Author: Kanakasabapathi Subramanian
Author: Kanakasabapathi Subramanian
Author: Wolfgang Maximilian Josef Hofmann
Author: 
Author: 
Author: Prem Pal
Author: Zuoying Lisa Zhang
Author: Chris Bok Lee
Author: Kourosh Khosraviani
Author: Xiujun James Li