Author: Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Silicon Molecular Beam Epitaxy 1995
Author: Silicon Molecular Beam Epitaxy, 1995
Author: Proceedings of the First International Symposium on Silicon Molecular Beam Epitaxy
Author: John Condon BeanPublisher:
ISBN:
Category : Molecular beam epitaxy
Languages : en
Pages : 478
Book Description
Silicon Molecular Beam Epitaxy
Author: Silicon Molecular Beam Epitaxy
Author: E. KasperPublisher: CRC Press
ISBN: 1351085077
Category : Technology & Engineering
Languages : en
Pages : 306
Book Description
This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.
Silicon molecular beam epitaxy
Author: Silicon Molecular Beam Epitaxy
Author: E. KasperProceedings of the Second International Symposium on Silicon Molecular Beam Epitaxy
Author: John Condon BeanPublisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 682
Book Description
Author: 
Author: