Silicon Membrane Gas Viscosity Sensor PDF Download

Author: Iris S. N. Takamatsu
Publisher:
ISBN:
Category :
Languages : en
Pages : 356

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Author: Glenfred J. S. Wong
Publisher:
ISBN:
Category :
Languages : en
Pages : 418

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Author: Benedetto Vigna
Publisher: Springer Nature
ISBN: 3030801357
Category : Technology & Engineering
Languages : en
Pages : 988

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Book Description
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

Author: Fan Ren
Publisher: CRC Press
ISBN: 1439813884
Category : Science
Languages : en
Pages : 318

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Book Description
Sales of U.S. chemical sensors represent the largest segment of the multi-billion-dollar global sensor market, which includes instruments for chemical detection in gases and liquids, biosensors, and medical sensors. Although silicon-based devices have dominated the field, they are limited by their general inability to operate in harsh environments

Author: Shreyas Choudhary
Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 98

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Book Description
"Being able to measure and monitor the viscosity of a fluid accurately and in real-time can provide insights and prevent field failures of lubricated mechanical elements. A micro electro mechanical system (MEMS) viscosity sensor that measures the properties of liquids through thermal vibrations of a silicon membrane has been previously developed. The device measures viscosity through three different characteristics: the frequency, amplitude and the quality factor of the vibrating membrane. The membrane is actuated via a short pulse of heat delivered by the heater resistor provided by an external voltage. The pulse width is controlled by a waveform generator and a power MOSFET. The movement of the membrane is measured with an in-situ piezoresistor Wheatstone bridge, which is powered by an external voltage source, and amplified with and instrumentational amplifier before the resulting vibrating signal is analyzed in LabView. The end goal of this work is to characterize the sensitivity and real-time response of a thermally actuated MEMS viscosity sensor. In addition, a process modification to include a deep reactive ion etch instead of a KOH etch, has been developed. As viscosity is dependent on temperature, when the membrane is actuated by heat, the effects of locally changing the fluid temperature will affect the sensitivity of the sensor. Optimized test bias condition results were, Wheatstone bridge bias voltage when increased over 7 V, the natural frequency of vibration of the sensor is modified. Pulse width and heater bias value can be adjusted for optimum sensor response. With these established bias conditions, the real-time response of the system was investigated. Epoxy was used to cover the sensor perimeter, protect the 25 - micron aluminum wire bond connections to a copper PCB and to glue the sensor onto the PCB. Test result show a spike in frequency and amplitude when different oils were added. As shown with additional tests, the spike is mainly caused by slight temperature variations that are introduced with new oil and how they affect the sensor packaging. Spikes were reduced by lowering the bridge bias voltage from 7 V to 3 V, which minimized the sensor heating. Furthermore, addition of oil in very small quantities, in the [microliter] range, reduced the changes in temperature. Figure 1 shows frequency and amplitude response with varying viscosities without agitation. During testing, when oil is added, the amplitude shows an immediate overdamped response which takes about 1-2 minutes to stabilize, whereas frequency is characterized by an underdamped response with response time 5-7 minutes. Frequency response time was slower as it is very dependent on intrinsic stresses of both sensor and packaging, whereas amplitude of oscillations seems to be more independent to these properties changing and shows faster response."--Abstract.

Author: J.L. Robert
Publisher: Elsevier
ISBN: 044459678X
Category : Technology & Engineering
Languages : en
Pages : 209

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Book Description
Progress in material research, recent developments in growth techniques, as well as in processing technology and modelling, have had a great impact on sensors. The contributions in this volume will be of interest to all those who wish to keep abreast of recent developments in the interdisciplinary field of sensor research.

Author: Ghenadii Korotcenkov
Publisher: Springer Science & Business Media
ISBN: 1461473888
Category : Science
Languages : en
Pages : 453

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Book Description
The two volumes of Handbook of Gas Sensor Materials provide a detailed and comprehensive account of materials for gas sensors, including the properties and relative advantages of various materials. Since these sensors can be applied for the automation of myriad industrial processes, as well as for everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and in many other situations, this handbook is of great value. Gas sensor designers will find a treasure trove of material in these two books.

Author: Florinel-Gabriel Banica
Publisher: John Wiley & Sons
ISBN: 1118354230
Category : Science
Languages : en
Pages : 795

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Book Description
Key features include: Self-assessment questions and exercises Chapters start with essential principles, then go on to address more advanced topics More than 1300 references to direct the reader to key literature and further reading Highly illustrated with 450 figures, including chemical structures and reactions, functioning principles, constructive details and response characteristics Chemical sensors are self-contained analytical devices that provide real-time information on chemical composition. A chemical sensor integrates two distinct functions: recognition and transduction. Such devices are widely used for a variety of applications, including clinical analysis, environment monitoring and monitoring of industrial processes. This text provides an up-to-date survey of chemical sensor science and technology, with a good balance between classical aspects and contemporary trends. Topics covered include: Structure and properties of recognition materials and reagents, including synthetic, biological and biomimetic materials, microorganisms and whole-cells Physicochemical basis of various transduction methods (electrical, thermal, electrochemical, optical, mechanical and acoustic wave-based) Auxiliary materials used e.g. synthetic and natural polymers, inorganic materials, semiconductors, carbon and metallic materials properties and applications of advanced materials (particularly nanomaterials) in the production of chemical sensors and biosensors Advanced manufacturing methods Sensors obtained by combining particular transduction and recognition methods Mathematical modeling of chemical sensor processes Suitable as a textbook for graduate and final year undergraduate students, and also for researchers in chemistry, biology, physics, physiology, pharmacology and electronic engineering, this bookis valuable to anyone interested in the field of chemical sensors and biosensors.

Author: Mario Pagliaro
Publisher: Royal Society of Chemistry
ISBN: 1847558984
Category : Science
Languages : en
Pages : 208

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Book Description
This clear and concise book is the first to address the hot topic of functional silica gels and their applications.

Author: Raivo Jaaniso
Publisher: Elsevier
ISBN: 0857098667
Category : Technology & Engineering
Languages : en
Pages : 571

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Book Description
Semiconductor gas sensors have a wide range of applications in safety, process control, environmental monitoring, indoor or cabin air quality and medical diagnosis. This important book summarises recent research on basic principles, new materials and emerging technologies in this essential field.The first part of the book reviews the underlying principles and sensing mechanisms for n- and p-type oxide semiconductors, introduces the theory for nanosize materials and describes the role of electrode–semiconductor interfaces. The second part of the book describes recent developments in silicon carbide- and graphene-based gas sensors, wide bandgap semiconductor gas sensors and micromachined and direct thermoelectric gas sensors. Part 3 discusses the use of nanomaterials for gas sensing, including metal oxide nanostructures, quantum dots, single-alled carbon nanotubes and porous silicon. The final part of the book surveys key applications in environmental monitoring, detecting chemical warfare agents and monitoring gases such as carbon dioxide.Semiconductor gas sensors is a valuable reference work for all those involved in gas monitoring, including those in the building industry, environmental engineers, defence and security specialists and researchers in this field. - Provides an overview of resistor and non-resistor sensors - Reviews developments in gas sensors and sensing methods, including graphene based sensors and direct thermoelectric sensors - Discusses the use of nanomaterials in gas sensing