Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry PDF Download
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Author: OECD Publisher: OECD Publishing ISBN: 9264502432 Category : Languages : en Pages : 80
Book Description
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
Author: OECD Publisher: OECD Publishing ISBN: 9264502432 Category : Languages : en Pages : 80
Book Description
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
Author: OECD Publisher: OECD Publishing ISBN: 9264221069 Category : Languages : en Pages : 224
Book Description
This emission scenario document (ESD) for chemicals used in the electronics industry provides information on the sources and release pathways of chemicals during various processing techniques in this varied industry sector, to help estimate releases of chemicals into the environment.
Author: OECD Publisher: OECD Publishing ISBN: 9264945423 Category : Languages : en Pages : 86
Book Description
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of non-volatile chemicals used in textile dyes. The document focuses primarily on the application of dyes to fibers, yarns and fabrics by batch or continuous processes.
Author: OECD Publisher: OECD Publishing ISBN: 9264996192 Category : Languages : en Pages : 47
Book Description
This OECD Emission Scenario Document (ESD) is a complement document to the Coating Industry (Paints, Lacquers and Varnishes, ESD No. 22 and provides information on the sources, use pattern and release pathways of chemicals used as solvents for industrial coatings, so as to help estimating the amount of chemicals released into the environment.
Author: OECD Publisher: OECD Publishing ISBN: 9264221166 Category : Languages : en Pages : 117
Book Description
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used in the semiconductor manufacturing industry.
Author: Cheol Seong Hwang Publisher: Springer Science & Business Media ISBN: 146148054X Category : Science Languages : en Pages : 266
Book Description
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author: Raivo Jaaniso Publisher: Woodhead Publishing ISBN: 0081025602 Category : Technology & Engineering Languages : en Pages : 512
Book Description
Semiconductor Gas Sensors, Second Edition, summarizes recent research on basic principles, new materials and emerging technologies in this essential field. Chapters cover the foundation of the underlying principles and sensing mechanisms of gas sensors, include expanded content on gas sensing characteristics, such as response, sensitivity and cross-sensitivity, present an overview of the nanomaterials utilized for gas sensing, and review the latest applications for semiconductor gas sensors, including environmental monitoring, indoor monitoring, medical applications, CMOS integration and chemical warfare agents. This second edition has been completely updated, thus ensuring it reflects current literature and the latest materials systems and applications. - Includes an overview of key applications, with new chapters on indoor monitoring and medical applications - Reviews developments in gas sensors and sensing methods, including an expanded section on gas sensor theory - Discusses the use of nanomaterials in gas sensing, with new chapters on single-layer graphene sensors, graphene oxide sensors, printed sensors, and much more
Author: Gary S. May Publisher: John Wiley & Sons ISBN: 0471790273 Category : Technology & Engineering Languages : en Pages : 428
Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Author: Dennis Schuetzle Publisher: ISBN: Category : Science Languages : en Pages : 416
Book Description
Presents the first comprehensive collection of articles on the fundamentals and applications of a wide variety of chemical sensors. Discusses a range of topics from the development of new sensor concepts to improvement in sensors that have been mass produced for several years. Specific types of sensors discussed include oxygen, electrochemical, microbial, drug, and glucose sensors.
Author: OECD
Author: OECD
Author: OECD
Author: OECD
Author: OECD
Author: OECD
Author: Cheol Seong Hwang
Author: Raivo Jaaniso
Author: Gary S. May
Author: 
Author: Dennis Schuetzle