MEMS Mechanical Sensors PDF Download

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MEMS Mechanical Sensors

MEMS Mechanical Sensors PDF Author: Stephen Beeby
Publisher: Artech House
ISBN: 1580535364
Category : Technology & Engineering
Languages : en
Pages : 282

Book Description
Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
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