Author: Publisher:
ISBN:
Category : Rapid thermal processing
Languages : en
Pages : 534
Book Description
Rapid Thermal and Integrated Processing
Author: Publisher:
ISBN:
Category : Rapid thermal processing
Languages : en
Pages : 534
Book Description
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
Author: David HaramePublisher: The Electrochemical Society
ISBN: 1566776562
Category : Electronic apparatus and appliances
Languages : en
Pages : 1136
Book Description
Advanced semiconductor technology is depending on innovation and less on "classical" scaling. SiGe, Ge, and Related Compounds have become a key component of the arsenal in improving semiconductor performance. This issue of ECS Transactions discusses the technology to form these materials, process them, FET devices incorporating them, Surfaces and Interfaces, Optoelectronic devices, and HBT devices.
Rapid Thermal Processing for Future Semiconductor Devices
Author: H. FukudaPublisher: Elsevier
ISBN: 0080540260
Category : Science
Languages : en
Pages : 161
Book Description
This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices.This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.
Crucial Issues in Semiconductor Materials and Processing Technologies
Author: S. CoffaPublisher: Springer Science & Business Media
ISBN: 940112714X
Category : Technology & Engineering
Languages : en
Pages : 523
Book Description
Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.
ULSI Science and Technology/1997
Author: Hisham Z. MassoudPublisher: The Electrochemical Society
ISBN: 9781566771306
Category : Computers
Languages : en
Pages : 686
Book Description
Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition
Author: Theodore M. BesmannPublisher: The Electrochemical Society
ISBN: 9781566771559
Category : Science
Languages : en
Pages : 922
Book Description
Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing: Volume 146
Author: David HodulPublisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 544
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
SiGe and Ge
Author: David Louis HaramePublisher: The Electrochemical Society
ISBN: 1566775078
Category : Electronic apparatus and appliances
Languages : en
Pages : 1280
Book Description
The second International SiGe & Ge: Materials, Processing, and Devices Symposium was part of the 2006 ECS conference held in Cancun, Mexico from October 29-Nov 3, 2006. This meeting provided a forum for reviewing and discussing all materials and device related aspects of SiGe & Ge. The hardcover edition includes a bonus CD-ROM containing the PDF of the entire issue.
Masters Theses in the Pure and Applied Sciences
Author: W. H. ShaferPublisher: Plenum Publishing Corporation
ISBN: 9780306443480
Category : Education
Languages : en
Pages : 392
Book Description
Masters Theses Listed by Discipline: Aerospace Engineering. Agricultural Economics, Sciences and Engineering. Architechtural Engineering and Urban Planning. Astronomy. Astrophysics. Ceramic Engineering. Communications Engineering and Computer Science. Cryogenic Engineering. Electrical Engineering. Engineering Mechanics. Engineering Physics. Engineering Science. Fuels, Combustion, and Air Pollution. General and Environmental Engineering. Geochemistry and Soil Science. Geological Sciences and Geophysical Engineering. Geology and Earth Science. Geophysics. Industrial Engineering. Marine and Ocean Engineering. Materials Science and Engineering. Mechanical Engineering and Bioengineering. Metallurgy. Meteorology and Atmospheric Science. 17 additional disciplines. Index.
SiGe--materials, Processing, and Devices
Author: David Louis HaramePublisher: The Electrochemical Society
ISBN: 9781566774208
Category : Science
Languages : en
Pages : 1242
Book Description