Radio Frequency Sputtering Deposition and Characterization of Thin Ferroelectric Titanate Film on Silicon Substrates

Radio Frequency Sputtering Deposition and Characterization of Thin Ferroelectric Titanate Film on Silicon Substrates PDF Author: Cheng-Cheng Hu
Publisher:
ISBN:
Category : Ferroelectric storage cells
Languages : en
Pages : 254

Book Description


Characteristics of Rf Sputtered Barium Titanate Films on Silicon

Characteristics of Rf Sputtered Barium Titanate Films on Silicon PDF Author: C. A. T. Salama
Publisher:
ISBN:
Category :
Languages : en
Pages : 6

Book Description
The physical and electrical properties of barium titanate films approximately 1 micrometer thick, prepared by rf sputtering onto silicon substrates in both pure argon and 95% argon-5% oxygen glow discharges were investigated. The deposition rate, crystal structure, and refractive index of the films were investigated as a function of deposition temperature and sputtering gas. The electrical characteristics of the films, including the dielectric constant, loss tangent, conductivity, insulator bulk charge, charge storage at the BaTiO3-SiO2 interface, and ferroelectricity were also investigated. (Author).

Fabrication and Characterization of Barium Titanate Thin Film on Polycrystalline Nickel Substrate

Fabrication and Characterization of Barium Titanate Thin Film on Polycrystalline Nickel Substrate PDF Author: Parisa Sahebi
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description
Ferroelectric BaTiO3 (BTO) thin films were deposited on polycrystalline nickel disks and silicon wafer substrates by rf magnetron sputtering. Nickel oxide (NiO) and nanocrystalline nickel (nc-Ni) layers were used as interfacial buffer layers. Microstructural studies with X-ray diffraction and transmission electron microscopy reveal that the BTO films deposited at temperatures lower than 700°C have an amorphous structure. However, the BTO films sputtered at temperatures higher than 700°C are partially crystalline. BTO films have a good and continuous interface with both interfacial layers with no interdiffusion or reaction with the substrates. In the case of BTO deposition with nc-Ni interlayer at higher deposition temperature of 800°C, a thin NiO layer forms between the nc-Ni and BTO films. Having nc-Ni as an interfacial layer enhances surface morphology and decreases surface roughness. This study shows that nc-Ni can act as a proper interfacial layer between a ceramic like BTO and the metallic substrates and is a better alternative for NiO buffer layer.

Formation and Characterization of Ferroelectric Thin-films Deposited by Pulsed-laser Ablation

Formation and Characterization of Ferroelectric Thin-films Deposited by Pulsed-laser Ablation PDF Author: Christopher Scarfone
Publisher:
ISBN:
Category :
Languages : en
Pages : 208

Book Description


Ceramic Abstracts

Ceramic Abstracts PDF Author:
Publisher:
ISBN:
Category : Ceramics
Languages : en
Pages : 500

Book Description


Coatings and Thin-Film Technologies

Coatings and Thin-Film Technologies PDF Author: Jaime Andres Perez Taborda
Publisher: BoD – Books on Demand
ISBN: 1789848709
Category : Technology & Engineering
Languages : en
Pages : 288

Book Description
The field of coatings and thin-film technologies is rapidly advancing to keep up with new uses for semiconductor, optical, tribological, thermoelectric, solar, security, and smart sensing applications, among others. In this sense, thin-film coatings and structures are increasingly sophisticated with more specific properties, new geometries, large areas, the use of heterogeneous materials and flexible and rigid coating substrates to produce thin-film structures with improved performance and properties in response to new challenges that the industry presents. This book aims to provide the reader with a complete overview of the current state of applications and developments in thin-film technology, discussing applications, health and safety in thin films, and presenting reviews and experimental results of recognized experts in the area of coatings and thin-film technologies.

Fabrication and Evaluation of RF Sputtered Barium Titanate Thin Films

Fabrication and Evaluation of RF Sputtered Barium Titanate Thin Films PDF Author: I. H. Pratt
Publisher:
ISBN:
Category :
Languages : en
Pages : 41

Book Description
Structural, chemical, dielectric, and ferroelectric (limited) characteristics of RF sputtered barium titanate (BaTiO3) are described. Primary interest was to determine film capability for providing high capacitance devices for hybrid and thin film integrated circuits. The extent of ferroelectric film behavior was also of concern for charge storage use in the development of thin film image plates for miniature solid state facsimile cameras. Metal-dielectric-metal capacitor structures incorporating amorphous or polycrystalline BaTiO3 films were fabricated and evaluated. (Author).

Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]

Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform] PDF Author: Akhtar Mirfazli
Publisher: National Library of Canada = Bibliothèque nationale du Canada
ISBN: 9780612939431
Category : Acoustic surface wave devices
Languages : en
Pages : 192

Book Description


Deposition and Characterization of Ferroelectric Films for Smart Pixel Applications

Deposition and Characterization of Ferroelectric Films for Smart Pixel Applications PDF Author: Subramania Krishnakumar
Publisher:
ISBN:
Category :
Languages : en
Pages : 448

Book Description


Broadband Optical Modulators

Broadband Optical Modulators PDF Author: Antao Chen
Publisher: CRC Press
ISBN: 1439825076
Category : Science
Languages : en
Pages : 555

Book Description
"provides the full, exciting story of optical modulators. a comprehensive review, from the fundamental science to the material and processing technology to the optimized device design to the multitude of applications for which broadband optical modulators bring great value. Especially valuable in my view is that the authors are internationally