Author: G. S. MathadPublisher: The Electrochemical Society
ISBN: 9781566770668
Category : Technology & Engineering
Languages : en
Pages : 452
Book Description
Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control
Author: G. S. MathadPublisher: The Electrochemical Society
ISBN: 9781566770668
Category : Technology & Engineering
Languages : en
Pages : 452
Book Description
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes
Author: G. S. MathadPublisher: The Electrochemical Society
ISBN: 9781566771832
Category : Technology & Engineering
Languages : en
Pages : 388
Book Description
Proceedings of the Eleventh International Symposium on Plasma Processing
Author: Electrochemical Society. Dielectric Science and Technology DivisionPublisher: The Electrochemical Society
ISBN: 9781566771641
Category : Science
Languages : en
Pages : 740
Book Description
Proceedings of the Tenth Symposium on Plasma Processing
Author: Electrochemical Society. Dielectric Science and Technology DivisionPublisher: The Electrochemical Society
ISBN: 9781566770774
Category : Science
Languages : en
Pages : 622
Book Description
Handbook of Silicon Wafer Cleaning Technology
Author: Karen ReinhardtPublisher: William Andrew
ISBN: 032351085X
Category : Technology & Engineering
Languages : en
Pages : 794
Book Description
Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. - Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits - Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries - Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
The Cumulative Book Index
Author: Publisher:
ISBN:
Category : American literature
Languages : en
Pages : 2266
Book Description
Cumulative Book Index
Author: Publisher:
ISBN:
Category : American literature
Languages : en
Pages : 2264
Book Description
A world list of books in the English language.
Compound Semiconductors 1995, Proceedings of the Twenty-Second INT Symposium on Compound Semiconductors held in Cheju Island, Korea, 28 August-2 September, 1995
Author: Institute of Physics ConferencePublisher: CRC Press
ISBN: 1000112292
Category : Science
Languages : en
Pages : 1345
Book Description
Compound Semiconductors 1995 focuses on emerging applications for GaAs and other compound semiconductors, such as InP, GaN, GaSb, ZnSe, and SiC, in the electronics and optoelectronics industries. The book presents the research and development work in all aspects of compound semiconductors. It reflects the maturity of GaAs as a semiconductor material and the rapidly increasing pool of research information on many other compound semiconductors. Covering the full breadth of the subject, from growth through processing to devices and integrated circuits, this volume provides researchers in materials science, device physics, condensed matter physics, and electrical and electronic engineering with a comprehensive overview of developments in this well-established research area.
Compound Semiconductors 1995, Proceedings of the Twenty-Second INT Symposium on Compound Semiconductors held in Cheju Island, Korea, 28 August-2 September, 1995
Author: WooPublisher: CRC Press
ISBN: 9780750303422
Category : Technology & Engineering
Languages : en
Pages : 1352
Book Description
Compound Semiconductors 1995 focuses on emerging applications for GaAs and other compound semiconductors, such as InP, GaN, GaSb, ZnSe, and SiC, in the electronics and optoelectronics industries. The book presents the research and development work in all aspects of compound semiconductors. It reflects the maturity of GaAs as a semiconductor material and the rapidly increasing pool of research information on many other compound semiconductors. Covering the full breadth of the subject, from growth through processing to devices and integrated circuits, this volume provides researchers in materials science, device physics, condensed matter physics, and electrical and electronic engineering with a comprehensive overview of developments in this well-established research area.
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
Author: F. RenPublisher: The Electrochemical Society
ISBN: 9781566771160
Category : Technology & Engineering
Languages : en
Pages : 524
Book Description