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Proceedings of the First International Symposium on Advanced Materials for ULSI

Author: Martin P. Scott
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 260

Book Description

Proceedings of the First International Symposium on Advanced Materials for ULSI

Author: Martin P. Scott
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 260

Book Description

ULSI Science and Technology, 1989

Author: C. M. Osburn
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 804

Book Description

Proceedings of the Symposium on High Voltage and Smart Power ICs

Author: Muhammed Ayman Shibib
Publisher:
ISBN:
Category : High voltages
Languages : en
Pages : 562

Book Description

Silicide Thin Films: Volume 402

Author: Raymond T. Tung
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 680

Book Description
Tremendous advances have been made in the use of silicides as contacts and interconnects in micro-electronic devices and as active layers in sensors. A flourish of novel fabrication concepts and characterization techniques has led to high-quality silicide devices and a better understanding of the electronic and micrometallurgical properties of their interfaces. However, the shrinking physical dimensions of ULSI devices beyond the deep submicron regime now poses new and serious materials challenges for the development of manufacturable silicide processes. Scientists and engineers from materials science, physics, chemistry, device, processing and other disciplines come together in this book to examine the current issues facing silicide thin-film applications. Topics include: silicide fundamentals - energetics and kinetics; processing of silicide thin films; ULSI issues; CVD silicides; semiconducting silicides; processing of germano-silicide thin films; silicides and analogs for IR detection; interfaces, surfaces and epitaxy; novel structures and techniques and properties of silicide thin films.

ULSI Process Integration

Author: Cor L. Claeys
Publisher: The Electrochemical Society
ISBN: 9781566772419
Category : Computers
Languages : en
Pages : 408

Book Description

ULSI Science and Technology/1987

Author: S. Broydo
Publisher:
ISBN:
Category : Integrated circuits
Languages : en
Pages : 874

Book Description

Index of Conference Proceedings

Author: British Library. Document Supply Centre
Publisher:
ISBN:
Category : Conference proceedings
Languages : en
Pages : 696

Book Description

ULSI Process Integration III

Author: Electrochemical Society. Meeting
Publisher: The Electrochemical Society
ISBN: 9781566773768
Category : Technology & Engineering
Languages : en
Pages : 620

Book Description

Proceedings of the First International Symposium on Chemical Mechanical Planarization

Author: Iqbal Ali
Publisher: The Electrochemical Society
ISBN: 9781566771726
Category : Science
Languages : en
Pages : 294

Book Description

Science Abstracts

Author:
Publisher:
ISBN:
Category : Electric engineering
Languages : en
Pages : 2332

Book Description