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Author: Yuzhuo Li Publisher: John Wiley & Sons ISBN: 0471719196 Category : Technology & Engineering Languages : en Pages : 764
Book Description
An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.
Author: Yuzhuo Li Publisher: John Wiley & Sons ISBN: 0471719196 Category : Technology & Engineering Languages : en Pages : 764
Book Description
An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.
Author: Cheol Seong Hwang Publisher: Springer Science & Business Media ISBN: 146148054X Category : Science Languages : en Pages : 266
Book Description
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Author: Publisher: ISBN: Category : Languages : en Pages : 140
Book Description
Backpacker brings the outdoors straight to the reader's doorstep, inspiring and enabling them to go more places and enjoy nature more often. The authority on active adventure, Backpacker is the world's first GPS-enabled magazine, and the only magazine whose editors personally test the hiking trails, camping gear, and survival tips they publish. Backpacker's Editors' Choice Awards, an industry honor recognizing design, feature and product innovation, has become the gold standard against which all other outdoor-industry awards are measured.
Author: Donald M. Mattox Publisher: William Andrew ISBN: 0128130857 Category : Technology & Engineering Languages : en Pages : 383
Book Description
The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. - History and detailed descriptions of Vacuum Deposition Technologies - Review of Enabling Technologies and their importance to current applications - Extensively referenced text - Patents are referenced as part of the history - Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology - Glossary of Terms for vacuum coating
Author: National Research Council Publisher: National Academies Press ISBN: 0309142393 Category : Law Languages : en Pages : 348
Book Description
Scores of talented and dedicated people serve the forensic science community, performing vitally important work. However, they are often constrained by lack of adequate resources, sound policies, and national support. It is clear that change and advancements, both systematic and scientific, are needed in a number of forensic science disciplines to ensure the reliability of work, establish enforceable standards, and promote best practices with consistent application. Strengthening Forensic Science in the United States: A Path Forward provides a detailed plan for addressing these needs and suggests the creation of a new government entity, the National Institute of Forensic Science, to establish and enforce standards within the forensic science community. The benefits of improving and regulating the forensic science disciplines are clear: assisting law enforcement officials, enhancing homeland security, and reducing the risk of wrongful conviction and exoneration. Strengthening Forensic Science in the United States gives a full account of what is needed to advance the forensic science disciplines, including upgrading of systems and organizational structures, better training, widespread adoption of uniform and enforceable best practices, and mandatory certification and accreditation programs. While this book provides an essential call-to-action for congress and policy makers, it also serves as a vital tool for law enforcement agencies, criminal prosecutors and attorneys, and forensic science educators.
Author: Eduardo Ruiz-Hitzky Publisher: John Wiley & Sons ISBN: 3527621458 Category : Science Languages : en Pages : 521
Book Description
This ready reference is the first to collate the interdisciplinary knowledge from materials science, bioengineering and nanotechnology to give an in-depth overview of the topic. As such, it provides broad coverage of combinations between inorganic materials and such key biological structures as proteins, enzymes, DNA, or biopolymers. With its treatment of various application directions, including bioelectronic interfacing, tissue repair, porous membranes, sensors, nanocontainers, and DNA engineering, this is essential reading for materials engineers, medical researchers, catalytic chemists, biologists, and those working in the biotechnological and semiconductor industries.
Author: Anthony E. Hughes Publisher: Springer ISBN: 9401775400 Category : Technology & Engineering Languages : en Pages : 429
Book Description
This book covers a broad range of materials science that has been brought to bear on providing solutions to the challenges of developing self-healing and protective coatings for a range of metals. The book has a strong emphasis on characterisation techniques, particularly new techniques that are beginning to be used in the coatings area. It features many contributions written by experts from various industrial sectors which examine the needs of the sectors and the state of the art. The development of self-healing and protective coatings has been an expanding field in recent years and applies a lot of new knowledge gained from other fields as well as other areas of materials science to the development of coatings. It has borrowed from fields such as the food and pharmaceutical industries who have used, polymer techniques, sol-gel science and colloidosome technology for a range encapsulation techniques. It has also borrowed from fields like hydrogen storage such as from the development of hierarchical and other materials based on organic templating as “nanocontainers” for the delivery of inhibitors. In materials science, recent developments in high throughput and other characterisation techniques, such as those available from synchrotrons, are being increasing used for novel characterisation – one only needs to look at the application of these techniques in self healing polymers to gauge wealth of new information that has been gained from these techniques. This work is largely driven by the need to replace environmental pollutants and hazardous chemicals that represent risk to humans such as chromate inhibitors which are still used in some applications.
Author: K.H. Stern Publisher: Springer Science & Business Media ISBN: 9400915012 Category : Science Languages : en Pages : 353
Book Description
Surface engineering is an increasingly important field and consequently those involved need to be aware of the vast range of technologies available to modify surfaces. This text provides an up-to-date, authoritative exposition of the major condensed phase methods used for producing metallurgical and ceramic coatings. Each method is discussed thoroughly by an expert in that field. In each chapter the principle of the method, its range of applications and technical aspects involved are described. The book not only informs the reader about established technologies familiar only to specialists, but also details activity on the frontier of coating technology providing an insight into those potential technologies not yet fully developed but which should emerge in the near future.
Author: International Atomic Energy Agency Publisher: IAEA ISBN: Category : Business & Economics Languages : en Pages : 188
Book Description
Over the past decade significant progress has been achieved in the development of waste characterization and control procedures and equipment as a direct response to ever-increasing requirements for quality and reliability of information on waste characteristics. Failure in control procedures at any step can have important, adverse consequences and may result in producing waste packages which are not compliant with the waste acceptance criteria for disposal, thereby adversely impacting the repository. The information and guidance included in this publication corresponds to recent achievements and reflects the optimum approaches, thereby reducing the potential for error and enhancing the quality of the end product. -- Publisher's description.
Author: Jonathan W-C Wong Publisher: Elsevier ISBN: 0444636757 Category : Science Languages : en Pages : 532
Book Description
Current Developments in Biotechnology and Bioengineering: Solid Waste Management provides extensive coverage of new developments, state-of-the-art technologies, and potential future trends, reviewing the latest innovative developments in environmental biotechnology and bioengineering as they pertain to solid wastes, also revealing current research priority areas in solid waste treatment and management. The fate of solid wastes can be divided into three major areas, recycling, energy recovery, and safe disposal. From this foundation, the book covers such key areas as biotechnological production of value added products from solid waste, bioenergy production from various organic solid wastes, and biotechnological solutions for safe, environmentally-friendly treatment and disposal. The state of the art situation, potential advantages, and limitations are discussed, along with proposed strategies on how to overcome limitations. - Reviews available bioprocesses for the production of bioproducts from solid waste - Outlines processes for the production of energy from solid waste using biochemical conversion processes - Lists various environmentally friendly treatments of solid waste and its safe disposal
Author: Yuzhuo Li
Author: Yuzhuo Li
Author: Cheol Seong Hwang
Author: 
Author: Donald M. Mattox
Author: National Research Council
Author: Eduardo Ruiz-Hitzky
Author: Anthony E. Hughes
Author: K.H. Stern
Author: International Atomic Energy Agency
Author: Jonathan W-C Wong