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Author: Ronald R. Willey Publisher: Wiley Optical Consultants ISBN: 9780615137605 Category : Technology & Engineering Languages : en Pages : 148
Book Description
This book deals with the basic understanding, perspective, details, and practical monitoring and control of optical thin films in fabrication/production. It focuses on this practical element needed to actually produce optical coatings. This is an essential adjunct to the necessary design, equipment, materials, process development and know-how required.
Author: Ronald R. Willey Publisher: Wiley Optical Consultants ISBN: 9780615137605 Category : Technology & Engineering Languages : en Pages : 148
Book Description
This book deals with the basic understanding, perspective, details, and practical monitoring and control of optical thin films in fabrication/production. It focuses on this practical element needed to actually produce optical coatings. This is an essential adjunct to the necessary design, equipment, materials, process development and know-how required.
Author: Ronald R. Willey Publisher: Willey Optical, Consultants ISBN: 9780615181448 Category : Technology & Engineering Languages : en Pages : 164
Book Description
This book deals with the basic understanding, perspective, details, and practical monitoring and control of optical thin films in fabrication/production. It focuses on this practical element needed to actually produce optical coatings. This is an essential adjunct to the necessary design, equipment, materials, process development and know-how required.
Author: Ronald R. Willey Publisher: Lulu.com ISBN: 1365536130 Category : Languages : en Pages : 742
Book Description
This book deals with the typical equipment, materials, processes, monitoring, and control used in the practical fabrication/production of optical thin films. It focuses on the practical elements needed to actually produce optical coatings.
Author: Ronald R. Willey Publisher: CRC Press ISBN: 0824743466 Category : Science Languages : en Pages : 542
Book Description
Providing insider viewpoints and perspectives unavailable in any other text, this book presents useful guidelines and tools to produce effective coatings and films. Covering subjects ranging from materials selection and process development to successful system construction and optimization, it contains expanded discussions on design visualization, dense wavelength division multiplexing, new coating equipment, electrochromic and chemically active coatings, ion-assisted deposition, and optical monitoring sensitivity. Furnishing real-world examples and know-how, the book introduces Fourier analysis and synthesis without difficult mathematical concepts and equations.
Author: Ronald R. Willey Publisher: Wiley Optical Consultants ISBN: 9780615143972 Category : Technology & Engineering Languages : en Pages : 248
Book Description
This book deals with the typical equipment, materials, and processes used in the fabrication/production optical thin films. It focuses on the practical elements needed to actually produce optical coatings. This is an essential adjunct to the necessary design, monitoring, and control which is also required.
Author: Ronald R Willey Publisher: Lulu.com ISBN: 1387526359 Category : Languages : en Pages : 487
Book Description
This book deals with the basic fundamentals, understanding, and design of optical thin films, or interference coatings for practical production. It focuses on one of the main subjects that is critical to meeting the practical challenges of producing optical coatings. This is the design of coatings, an understanding of which allows the practitioner to know the possibilities and limitations involved in reducing, enhancing, or otherwise controlling the reflection, transmission, and absorption of light (visible or otherwise). This Fifth Edition now includes measurement of index, thickness, and color; the determination of tooling factors; and the programming of Macros, Workbooks, and FilmStar Basic.
Author: Michael Quinten Publisher: John Wiley & Sons ISBN: 3527664351 Category : Science Languages : en Pages : 212
Book Description
A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.
Author: Irving P. Herman Publisher: Elsevier ISBN: 0080538088 Category : Technology & Engineering Languages : en Pages : 815
Book Description
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing Useful as an introduction to the subject or as a resource handbook Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing Examples emphasize applications in microelectronics and optoelectronics Introductory chapter serves as a guide to all optical diagnostics and their applications Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
Author: Ronald R. Willey Publisher: CRC Press ISBN: 9780367396039 Category : Languages : en Pages : 568
Book Description
Providing insider viewpoints and perspectives unavailable in any other text, this book presents useful guidelines and tools to produce effective coatings and films. Covering subjects ranging from materials selection and process development to successful system construction and optimization, it contains expanded discussions on design visualization, dense wavelength division multiplexing, new coating equipment, electrochromic and chemically active coatings, ion-assisted deposition, and optical monitoring sensitivity. Furnishing real-world examples and know-how, the book introduces Fourier analysis and synthesis without difficult mathematical concepts and equations.
Author: Ronald R. Willey Publisher: ISBN: 9780578084725 Category : Languages : en Pages : 326
Book Description
This book deals with the basic fundamentals, understanding, and design of optical thin films, or interference coatings for practical production. It focuses on the design of coatings, an understanding of which allows the practitioner to know the possibilities and limitations involved in reducing, enhancing, or otherwise controlling the reflection, transmission, and absorption of light (visible or otherwise). It provides estimating before designing, and examples of how to design.