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Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides

Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides PDF Author: Joseph Edward Schoenholtz
Publisher:
ISBN:
Category :
Languages : en
Pages : 390

Book Description

Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides

Plasma-enhanced Chemical Vapor Deposition of Silicon Oxynitrides PDF Author: Joseph Edward Schoenholtz
Publisher:
ISBN:
Category :
Languages : en
Pages : 390

Book Description

Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source

Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride and Oxynitride Films Using Disilane as Silicon Source PDF Author: Giridhar Nallapati
Publisher:
ISBN:
Category :
Languages : en
Pages : 108

Book Description

Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride

Plasma Enhanced Chemical Vapor Deposition of Silicon Oxide and Silicon Nitride PDF Author: William H. Ritchie
Publisher:
ISBN:
Category : Plasma (Ionized gases)
Languages : en
Pages : 118

Book Description

Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films

Thermal and Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Films PDF Author: Sui-Yuan Lynn
Publisher:
ISBN:
Category : Silicon nitride
Languages : en
Pages : 212

Book Description

Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films

Study of Plasma-enhanced Chemical Vapor Deposition of Silicon Thin Films PDF Author: Guanghui Yao
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 148

Book Description

Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films

Plasma-Enhanced Chemical Vapor Deposition of Silicon and Silicon-Containing Films PDF Author: DW. Hess
Publisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 8

Book Description
The use of a radio frequency (rf) glow discharge or plasma has recently come into favor for the deposition of thin films. In plasma-enhanced chemical vapor deposition (PECVD), chemical reactions can be carried out at low (

Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films

Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films PDF Author: Kevin John Grannen
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description

Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films

Plasma Enhanced Chemical Vapor Deposition of Silicon Oxycarbide Thin Films PDF Author: Gina Marie Buccellato
Publisher:
ISBN:
Category :
Languages : en
Pages : 230

Book Description

Deposition of Fluorinated Silicon Nitride Using Plasma Enhanced Chemical Vapor Deposition

Deposition of Fluorinated Silicon Nitride Using Plasma Enhanced Chemical Vapor Deposition PDF Author: Mohammad Ibrahim Khan
Publisher:
ISBN:
Category : Plasma-enhanced chemical vapor deposition
Languages : en
Pages : 334

Book Description

Remote plasma enhanced chemical vapor deposition of silicon on silicon

Remote plasma enhanced chemical vapor deposition of silicon on silicon PDF Author: Brian George Anthony
Publisher:
ISBN:
Category : Vapor-plating
Languages : en
Pages : 172

Book Description

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