Author: P.F. Williams
Publisher: Springer Science & Business Media
ISBN: 9401158843
Category : Technology & Engineering
Languages : en
Pages : 610
Book Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Plasma Processing of Semiconductors
Author: P.F. Williams
Publisher: Springer Science & Business Media
ISBN: 9401158843
Category : Technology & Engineering
Languages : en
Pages : 610
Book Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Publisher: Springer Science & Business Media
ISBN: 9401158843
Category : Technology & Engineering
Languages : en
Pages : 610
Book Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Plasma Effects in semiconductors
Author: A. D. Boardman
Publisher:
ISBN:
Category : Magnetohydrodynamics
Languages : en
Pages : 173
Book Description
Publisher:
ISBN:
Category : Magnetohydrodynamics
Languages : en
Pages : 173
Book Description
Plasma Effects in Semiconductors
Author: A. C. Baynham
Publisher:
ISBN: 9780389041726
Category : Electromagnetic waves
Languages : en
Pages : 0
Book Description
Publisher:
ISBN: 9780389041726
Category : Electromagnetic waves
Languages : en
Pages : 0
Book Description
Plasma Processing of Materials
Author: National Research Council
Publisher: National Academies Press
ISBN: 0309045975
Category : Technology & Engineering
Languages : en
Pages : 88
Book Description
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Publisher: National Academies Press
ISBN: 0309045975
Category : Technology & Engineering
Languages : en
Pages : 88
Book Description
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Plasma Processes for Semiconductor Fabrication
Author: W. N. G. Hitchon
Publisher: Cambridge University Press
ISBN: 0521591759
Category : Computers
Languages : en
Pages : 235
Book Description
An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Publisher: Cambridge University Press
ISBN: 0521591759
Category : Computers
Languages : en
Pages : 235
Book Description
An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Plasma and Current Instabilities in Semiconductors
Author: Juras Pozhela
Publisher: Elsevier
ISBN: 1483189384
Category : Science
Languages : en
Pages : 319
Book Description
Plasma and Current Instabilities in Semiconductors details the main ideas in the physics of plasma and current instabilities in semiconductors. The title first covers plasma in semiconductors, and then proceeds to tackling waves in plasma. Next, the selection details wave instabilities in plasma and drift instabilities. The text also discusses hot electrons, along with the instabilities due to inter-valley electron transfer. The next chapters talks about avalanche and recombination instabilities. The last chapter deals with plasma streams. The book will be of great use to student and professional electronics engineers and technicians.
Publisher: Elsevier
ISBN: 1483189384
Category : Science
Languages : en
Pages : 319
Book Description
Plasma and Current Instabilities in Semiconductors details the main ideas in the physics of plasma and current instabilities in semiconductors. The title first covers plasma in semiconductors, and then proceeds to tackling waves in plasma. Next, the selection details wave instabilities in plasma and drift instabilities. The text also discusses hot electrons, along with the instabilities due to inter-valley electron transfer. The next chapters talks about avalanche and recombination instabilities. The last chapter deals with plasma streams. The book will be of great use to student and professional electronics engineers and technicians.
Propagation and Magneto-plasma Effects in Semiconductors
Author: Benjamin Lax
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 26
Book Description
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 26
Book Description
Plasma Processes for Semiconductor Fabrication
Author: W. N. G. Hitchon
Publisher: Cambridge University Press
ISBN: 9780521591751
Category : Technology & Engineering
Languages : en
Pages : 232
Book Description
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the various models for understanding plasma processes. He then covers plasma chemistry, addressing the effects of different chemicals on the features being etched. Having presented the relevant background material, he then describes in detail the modeling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many homework exercises and serves as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practicing engineers in the semiconductor industry.
Publisher: Cambridge University Press
ISBN: 9780521591751
Category : Technology & Engineering
Languages : en
Pages : 232
Book Description
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modeled. The author begins with an overview of plasma reactors and discusses the various models for understanding plasma processes. He then covers plasma chemistry, addressing the effects of different chemicals on the features being etched. Having presented the relevant background material, he then describes in detail the modeling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many homework exercises and serves as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practicing engineers in the semiconductor industry.
Nonlocal Contributions to Magneto-plasma Effects in Semiconductors
Author: Gary Bob Lane
Publisher:
ISBN:
Category : Fermi surfaces
Languages : en
Pages : 46
Book Description
Publisher:
ISBN:
Category : Fermi surfaces
Languages : en
Pages : 46
Book Description
Plasma Effects in Solids
Author: Symposium on Plasma Effects in Solids
Publisher:
ISBN:
Category : Plasma (Ionized gases)
Languages : en
Pages : 221
Book Description
Publisher:
ISBN:
Category : Plasma (Ionized gases)
Languages : en
Pages : 221
Book Description