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Author: Joseph C. Doll Publisher: Springer Science & Business Media ISBN: 1461485177 Category : Technology & Engineering Languages : en Pages : 252
Book Description
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
Author: Joseph C. Doll Publisher: Springer Science & Business Media ISBN: 1461485177 Category : Technology & Engineering Languages : en Pages : 252
Book Description
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
Author: Minhang Bao Publisher: Elsevier ISBN: 008045562X Category : Technology & Engineering Languages : en Pages : 327
Book Description
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Author: Raj, Balwinder Publisher: IGI Global ISBN: 1799813959 Category : Technology & Engineering Languages : en Pages : 255
Book Description
With recent advancements in electronics, specifically nanoscale devices, new technologies are being implemented to improve the properties of automated systems. However, conventional materials are failing due to limited mobility, high leakage currents, and power dissipation. To mitigate these challenges, alternative resources are required to advance electronics further into the nanoscale domain. Carbon nanotube field-effect transistors are a potential solution yet lack the information and research to be properly utilized. Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET) is a collection of innovative research on the methods and applications of converting semiconductor devices from micron technology to nanotechnology. The book provides readers with an updated status on existing CNTs, CNTFETs, and their applications and examines practical applications to minimize short channel effects and power dissipation in nanoscale devices and circuits. While highlighting topics including interconnects, digital circuits, and single-wall CNTs, this book is ideally designed for electrical engineers, electronics engineers, students, researchers, academicians, industry professionals, and practitioners working in nanoscience, nanotechnology, applied physics, and electrical and electronics engineering.
Author: Juan Carlos Figueroa-García Publisher: Springer Nature ISBN: 3030310191 Category : Computers Languages : en Pages : 784
Book Description
This volume constitutes the refereed proceedings of the 6th Workshop on Engineering Applications, WEA 2019, held in Santa Marta, Colombia, in October 2019. The 62 revised full papers and 2 short papers presented in this volume were carefully reviewed and selected from 178 submissions. The papers are organized in the following topical sections: computer science; computational intelligence; bioengineering; Internet of things; power applications; simulation systems; optimization.
Author: Farzad Ebrahimi Publisher: BoD – Books on Demand ISBN: 9535107690 Category : Technology & Engineering Languages : en Pages : 414
Book Description
In the past few decades, the Finite Element Method (FEM) has been developed into a key indispensable technology in the modeling and simulation of various engineering systems. The present book reports on the state of the art research and development findings on this very broad matter through original and innovative research studies exhibiting various investigation directions of FEM in electrical, civil, materials and biomedical engineering. This book is a result of contributions of experts from international scientific community working in different aspects of FEM. The text is addressed not only to researchers, but also to professional engineers, students and other experts in a variety of disciplines, both academic and industrial seeking to gain a better understanding of what has been done in the field recently, and what kind of open problems are in this area.
Author: Evgeni Gusev Publisher: Springer Science & Business Media ISBN: 9048138051 Category : Technology & Engineering Languages : en Pages : 310
Book Description
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Author: R. Maheswar Publisher: Springer Nature ISBN: 3030701832 Category : Technology & Engineering Languages : en Pages : 285
Book Description
This book discusses advances in smart and sustainable development of smart environments. The authors discuss the challenges faced in developing sustainable smart applications and provide potential solutions. The solutions are aimed at improving reliability and security with the goal of affordability, safety, and durability. Topics include health care applications, sustainable smart transportation systems, intelligent sustainable wearable electronics, and sustainable smart building and alert systems. Authors are from both industry and academia and present research from around the world. Addresses problems and solutions for sustainable development of smart cities; Includes applications such as healthcare, transportation, wearables, security, and more; Relevant for scientist and researchers working on real time smart city development.
Author: Markku Tilli Publisher: William Andrew ISBN: 0323312233 Category : Technology & Engineering Languages : en Pages : 827
Book Description
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory
Author: Nahid Harjee Publisher: Stanford University ISBN: Category : Languages : en Pages : 209
Book Description
Scanning probe techniques provide a wealth of information about the nanoscale properties of materials and devices. In scanning gate microscopy (SGM), the current through a sample is recorded as a sharp, conductive tip that modifies the local electrostatic potential is scanned above the surface. SGM has been used to map current flow, carrier density and potential barriers. Existing, unshielded SGM probes have significant stray capacitance, resulting in poor lateral resolution when they are used to image nanostructures. Thus, there is a need for a probe that minimizes stray capacitance to produce highly-localized electric fields. This probe must also self-sense topography for tip-sample alignment, as the conventional laser-based detection methods can disturb photosensitive samples. In this thesis, we present a new scanning probe that integrates a coaxial tip on a piezoresistive cantilever. The coaxial tip is comprised of a heavily-doped silicon inner conductor and an aluminum outer shield, separated by a silicon dioxide insulator. By shielding the inner conductor up to the tip apex, this tip configuration minimizes stray capacitance to produce narrow electrostatic potential profiles. A piezoresistor is embedded at the root of the cantilever and enables electrical measurement of deflection at the free end. Scanning gate microscopy is commonly performed at room temperature (room-T) and low temperature (low-T). We discuss the design of piezoresistive cantilevers for atomic force microscopy (AFM) under both temperature regimes. We introduce a numerical optimizer that we used to identify 12 cantilever designs for use at room-T and low-T for hard, semiconductor samples and soft, biological samples. We show the results of finite-element analysis used to predict the electrostatic potential profiles produced by unshielded and coaxial tips. We investigate how the full-width at half-maximum (FWHM) of the coaxial tip perturbation varies with lift height and tip geometry. We discuss the development of a 7-mask process to fabricate scanning probes with both a coaxial tip and a piezoresistor. We compare two methods to create sub-micron tip apertures with focused ion beam milling, and provide a recipe that can repeatably produce openings with a radius of 30 nm. We describe the characterization of the piezoresistive cantilevers at room-T on a commercial AFM and at low-T on a home-built cryogenic scanning system. Finally, we provide images of the potential profile from the coaxial tip, obtained using a quantum point contact at low-T. In a measurement bandwidth from 1 Hz to 10 kHz, our scanning probes achieve a vertical displacement resolution of 2.8 A at 293 K and 82 A at 2 K, where the low temperature performance is limited by amplifier noise. When the coaxial tip is 100 nm above a sample, the FWHM of the electrostatic potential profile it produces at the surface is less than 240 nm, representing a 2.3x improvement in the lateral resolution of SGM over unshielded tips.
Author: Joseph C. Doll
Author: Joseph C. Doll
Author: Minhang Bao
Author: Raj, Balwinder
Author: Juan Carlos Figueroa-García
Author: Farzad Ebrahimi
Author: Evgeni Gusev
Author: R. Maheswar
Author: Markku Tilli
Author: 
Author: Nahid Harjee