Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges PDF Download

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Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges

Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges PDF Author: Robert Edward Klinger
Publisher:
ISBN:
Category :
Languages : en
Pages : 244

Book Description

Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges

Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges PDF Author: Robert Edward Klinger
Publisher:
ISBN:
Category :
Languages : en
Pages : 244

Book Description

Optical Spectroscopy Studies of the Reactive Ion Etching of Gallium Arsenide in Dichlorodifloromethane/oxygen/argon Discharges

Optical Spectroscopy Studies of the Reactive Ion Etching of Gallium Arsenide in Dichlorodifloromethane/oxygen/argon Discharges PDF Author: Hakki Ufuk Alpay
Publisher:
ISBN:
Category :
Languages : en
Pages : 108

Book Description

American Doctoral Dissertations

American Doctoral Dissertations PDF Author:
Publisher:
ISBN:
Category : Dissertation abstracts
Languages : en
Pages : 552

Book Description

Comprehensive Dissertation Index

Comprehensive Dissertation Index PDF Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 764

Book Description

Dissertation Abstracts International

Dissertation Abstracts International PDF Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 564

Book Description

Optical Spectroscopy Studies of Ion Bombarded Gallium Arsenide and Vanadium Carbide Thin Films

Optical Spectroscopy Studies of Ion Bombarded Gallium Arsenide and Vanadium Carbide Thin Films PDF Author: Kudakwashe Jakata
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 168

Book Description

Glow Discharge Optical Spectroscopy of ION Implanted Gallium Arsenide

Glow Discharge Optical Spectroscopy of ION Implanted Gallium Arsenide PDF Author: Suk Puangthum (2LT, RTAF.)
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 150

Book Description

Glow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide

Glow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide PDF Author: Kenneth R. Williamson (CAPT, USAF.)
Publisher:
ISBN:
Category : Gallium arsenide
Languages : en
Pages : 128

Book Description

Selective Reactive Ion Etching of Gallium Arsenide/aluminum Gallium Arsenide in Silicon Tetrachloride/silicon Tetrafluoride Plasmas

Selective Reactive Ion Etching of Gallium Arsenide/aluminum Gallium Arsenide in Silicon Tetrachloride/silicon Tetrafluoride Plasmas PDF Author: William Harris Guggina
Publisher:
ISBN:
Category :
Languages : en
Pages : 92

Book Description

Glow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide

Glow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide PDF Author: Kenneth R. Williamson
Publisher:
ISBN:
Category :
Languages : en
Pages : 86

Book Description
Glow Discharge Optical Spectroscopy (GDOS) was used as a technique for obtaining impurity concentration profiles of annealed and unannealed ion implanted GaAs samples. Germanium, magnesium, and boron ions were implanted at energies of 60keV or 120keV and fluences of 1 or 5 times 10 to the 15th power/sq.cm. The samples were sputtered in a dc glow discharge. The intensities of strong emission lines (proportional to concentration) were calibrated using pure elements as standards, providing impurity concentration profiles. (Author).
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