Author: Bruce A. Block
Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
The microstructure of the $\rm BaTiO\sb3$ films was investigated. The surface roughness generally increased with thickness, and the films were composed of many small subgrains, 0.1 to 0.3 microns in diameter. Grain boundary grooving was responsible for the observed surface roughening. Deposition of the metalorganic precursor on the substrate prior to the initiation of growth also contributed greatly to the surface roughness.