Author: Regina SoufliPublisher:
ISBN:
Category :
Languages : en
Pages : 260
Book Description
Optical Constants of Materials in the EUV/soft X-ray Region for Multilayer Mirror Applications
Soft X-Rays and Extreme Ultraviolet Radiation
Author: David AttwoodPublisher: Cambridge University Press
ISBN: 1139643428
Category : Technology & Engineering
Languages : en
Pages : 611
Book Description
This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
X-Rays and Extreme Ultraviolet Radiation
Author: David AttwoodPublisher: Cambridge University Press
ISBN: 1316810666
Category : Technology & Engineering
Languages : en
Pages :
Book Description
With this fully updated second edition, readers will gain a detailed understanding of the physics and applications of modern X-ray and EUV radiation sources. Taking into account the most recent improvements in capabilities, coverage is expanded to include new chapters on free electron lasers (FELs), laser high harmonic generation (HHG), X-ray and EUV optics, and nanoscale imaging; a completely revised chapter on spatial and temporal coherence; and extensive discussion of the generation and applications of femtosecond and attosecond techniques. Readers will be guided step by step through the mathematics of each topic, with over 300 figures, 50 reference tables and 600 equations enabling easy understanding of key concepts. Homework problems, a solutions manual for instructors, and links to YouTube lectures accompany the book online. This is the 'go-to' guide for graduate students, researchers and industry practitioners interested in X-ray and EUV interaction with matter.
Solid State Physics
Author: S. L. ChaplotPublisher: Alpha Science Int'l Ltd.
ISBN: 9788173194863
Category : Medical
Languages : en
Pages : 726
Book Description
This volume covers the proceedings of the 44th Department of Atomic Engineering (DAE) Solid State Physics Symposium.With contributions of papers from institutions from around the world. Contains 316 research articles, including 28 invited papers, on a wide range of topics of current interest in solid state physics comprising the following categories: Phase Transitions Phonons Soft-condensed Matter Electronic Structure Novel Materials Superconductivity Experimental Techniques and Instrumentation Magnetism Liquids, Glasses and Amorphous Systems Transport Properties Relaxation Studies Semiconductor Physics Surface Science Key Features: Recent developments in Synchrotron Research Photo-electron Spectroscopy Newly emerging superconductors
High-precision EUV and X-ray Optics for Advanced Photon Source Facilities
Author: Qiushi HuangPublisher: Frontiers Media SA
ISBN: 2832513182
Category : Science
Languages : en
Pages : 95
Book Description
Advances in X-ray/EUV Optics, Components, and Applications
Author: EUV Lithography
Author: Vivek BakshiPublisher: SPIE Press
ISBN: 0819469645
Category : Art
Languages : en
Pages : 704
Book Description
Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Grazing Incidence and Multilayer X-ray Optical Systems
Author: Richard B. HooverPublisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Nature
Languages : en
Pages : 562
Book Description
Soft X-ray and EUV Imaging Systems
Author: Optical Constants of Materials for UV and X-ray Wavelengths
Author: John F. SeelyPublisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Science
Languages : en
Pages : 190
Book Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.