Nouvelles Générations de Structures en Diamant Dopé Au Bore Par Technique de Delta-dopage Pour L'électronique de Puissance PDF Download

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Nouvelles Générations de Structures en Diamant Dopé Au Bore Par Technique de Delta-dopage Pour L'électronique de Puissance

Nouvelles Générations de Structures en Diamant Dopé Au Bore Par Technique de Delta-dopage Pour L'électronique de Puissance PDF Author: Alexandre Fiori
Publisher:
ISBN:
Category :
Languages : en
Pages : 0

Book Description
The aim of this PhD thesis was to better understand the boron delta-doping of diamond over building a new Microwave Plasma Chemical Vapour Deposition reactor prototype. We succeed to grow step by step heavy on low, and more original, low on heavy boron-doped layers of (100)-oriented diamond in the same process and without stopping the plasma. We also settled growth parameters for a growth rate slow enough to get nanometre-thick homoepitaxial films with boron doping jumps over several orders of magnitude, called delta-doping. We demonstrated the presence of super-sharp interfaces, after optimized in situ etching, by joint Secondary Ion Mass Spectrometry and Scanning Tunneling Electron Microscopy at High-Angle Annular Dark Field analysis. Finally superlattices with abrupt boron doping levels have been grown; they show satellite peaks of X-ray diffraction representative of a super-period.

Nouvelles Générations de Structures en Diamant Dopé Au Bore Par Technique de Delta-dopage Pour L'électronique de Puissance

Nouvelles Générations de Structures en Diamant Dopé Au Bore Par Technique de Delta-dopage Pour L'électronique de Puissance PDF Author: Alexandre Fiori
Publisher:
ISBN:
Category :
Languages : en
Pages : 0

Book Description
The aim of this PhD thesis was to better understand the boron delta-doping of diamond over building a new Microwave Plasma Chemical Vapour Deposition reactor prototype. We succeed to grow step by step heavy on low, and more original, low on heavy boron-doped layers of (100)-oriented diamond in the same process and without stopping the plasma. We also settled growth parameters for a growth rate slow enough to get nanometre-thick homoepitaxial films with boron doping jumps over several orders of magnitude, called delta-doping. We demonstrated the presence of super-sharp interfaces, after optimized in situ etching, by joint Secondary Ion Mass Spectrometry and Scanning Tunneling Electron Microscopy at High-Angle Annular Dark Field analysis. Finally superlattices with abrupt boron doping levels have been grown; they show satellite peaks of X-ray diffraction representative of a super-period.
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