Plasma Processing of Semiconductors PDF Download

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Plasma Processing of Semiconductors

Plasma Processing of Semiconductors PDF Author: Paul Williams
Publisher: Springer Science & Business Media
ISBN: 9780792345671
Category : Technology & Engineering
Languages : en
Pages : 634

Book Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Plasma Processing of Semiconductors

Plasma Processing of Semiconductors PDF Author: Paul Williams
Publisher: Springer Science & Business Media
ISBN: 9780792345671
Category : Technology & Engineering
Languages : en
Pages : 634

Book Description
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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