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Author: M. Moisan Publisher: Elsevier Science ISBN: 9780444888150 Category : Technology & Engineering Languages : en Pages : 0
Book Description
The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used in metallurgical treatment, and for materials processing in general. They also have the ability to dissociate molecules and excite atoms as required in analytical chemistry where the information on the constituent concentrations is obtained through optical spectroscopy or mass spectrometry. Finally, microwave plasmas can supply the photons for laser and lighting applications. It is noteworthy that microwave plasmas cover an impressive pressure range of eight orders of magnitude from 10-3 Pa (10-5 torr) to above atmospheric pressure. The versatility of microwave plasmas, their moderate cost, and their ease of implementation particularly appeal to the industrial entrepreneur. As well as providing a review of current developments, the work proposes a synthesis on microwave discharges, laying out the corresponding physical references without developing too much plasma theory. It will be of interest both to the user, who may not be overly concerned about plasma science, and to the plasma expert, who may wish to redirect his interest towards plasma applications, such as materials processing.
Author: M. Moisan Publisher: Elsevier Science ISBN: 9780444888150 Category : Technology & Engineering Languages : en Pages : 0
Book Description
The contrasting examples of microwave plasmas given in this volume demonstrate their capability of not only covering the totality of expressed needs in that particular field, but in many others. For example the ions and reactive neutral species, indispensable for the synergetic effects in etching and deposition processes can be used in metallurgical treatment, and for materials processing in general. They also have the ability to dissociate molecules and excite atoms as required in analytical chemistry where the information on the constituent concentrations is obtained through optical spectroscopy or mass spectrometry. Finally, microwave plasmas can supply the photons for laser and lighting applications. It is noteworthy that microwave plasmas cover an impressive pressure range of eight orders of magnitude from 10-3 Pa (10-5 torr) to above atmospheric pressure. The versatility of microwave plasmas, their moderate cost, and their ease of implementation particularly appeal to the industrial entrepreneur. As well as providing a review of current developments, the work proposes a synthesis on microwave discharges, laying out the corresponding physical references without developing too much plasma theory. It will be of interest both to the user, who may not be overly concerned about plasma science, and to the plasma expert, who may wish to redirect his interest towards plasma applications, such as materials processing.
Author: Krzysztof J. Jankowski Publisher: Royal Society of Chemistry ISBN: 1849730520 Category : Science Languages : en Pages : 263
Book Description
This book is the most comprehensive publication on MWP technology and MWP-OES analytical spectrometry with an emphasis on practical issues.
Author: Oleg A. Popov Publisher: Elsevier ISBN: 0815517890 Category : Science Languages : en Pages : 467
Book Description
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
Author: H. Schlüter Publisher: Springer Science & Business Media ISBN: 9401706336 Category : Science Languages : en Pages : 580
Book Description
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas
Author: E.F. Krimmel Publisher: Elsevier ISBN: 0444596364 Category : Technology & Engineering Languages : en Pages : 744
Book Description
This symposium attracted 82 papers which were presented orally or as posters. Fourteen invited speakers presented state of the art reviews and aspects of future key topics in this increasingly important area of materials science. The high level of scientific presentation during the conference enhanced the aim of the symposium, which was to stimulate discussion amongst materials scientists, chemists, engineers and physicists with a common interest in this field and to disseminate knowledge of progress.
Author: Gennadiy I. Churyumov Publisher: BoD – Books on Demand ISBN: 1839682264 Category : Science Languages : en Pages : 204
Book Description
More than 80 years of experience in the practical application of electromagnetic energy in various fields of human activity (industry, agriculture, science, medicine, etc.) suggests that microwave heating is an effective application of electromagnetic energy. This book presents the latest investigations on the applications of microwave energy and the effects of microwave radiation on various materials and mediums. Divided into two sections on thermal and nonthermal effects, this volume contains eight chapters that examine the use of microwave energy to extract bioactive compounds from plant materials, for rock-breaking operations, to synthesize functional dyes and nanomaterials, and more.
Author: Sudeep Bhattacharjee Publisher: Taylor & Francis ISBN: 1466557923 Category : Science Languages : en Pages : 390
Book Description
Recent research has brought the application of microwaves from the classical fields of heating, communication, and generation of plasma discharges into the generation of compact plasmas that can be used for applications such as FIB and small plasma thrusters. However, these new applications bring with them a new set of challenges. With coverage ran
Author: K Muraoka Publisher: CRC Press ISBN: 1420034065 Category : Science Languages : en Pages : 307
Book Description
Updated and expanded from the original Japanese edition, Laser-Aided Diagnostics of Gases and Plasmas takes a unique approach in treating laser-aided diagnostics. The book unifies the subject by joining applications instead of describing each application as a totally separate system. In taking this approach, it highlights the relative strengths of
Author: M. Moisan
Author: M. Moisan
Author: Krzysztof J. Jankowski
Author: Carlos M. Ferreira
Author: Oleg A. Popov
Author: H. Schlüter
Author: E.F. Krimmel
Author: Gennadiy I. Churyumov
Author: Sudeep Bhattacharjee
Author: K Muraoka
Author: