Micromachining of Monocrystalline Silicon Membranes for Sensor Applications Using Porous Silicon PDF Download

Author: Simon Armbruster
Publisher:
ISBN: 9783899594072
Category :
Languages : de
Pages : 150

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Author: Ghenadii Korotcenkov
Publisher: CRC Press
ISBN: 1482264595
Category : Science
Languages : en
Pages : 431

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Book Description
Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, sensor and energy technologies, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. This book, the third of a

Author: Ghenadii Korotcenkov
Publisher: CRC Press
ISBN: 1482264579
Category : Science
Languages : en
Pages : 418

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Book Description
Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. For example, the pores and surface chemistry of the mater

Author: Hélder A. Santos
Publisher: Woodhead Publishing
ISBN: 0128225246
Category : Medical
Languages : en
Pages : 646

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Book Description
Porous Silicon for Biomedical Applications, Second Edition, provides an updated guide to the diverse range of biomedical applications of porous silicon, from biosensing and imaging to tissue engineering and cancer therapy. Across biomedical disciplines, there is an ongoing search for biomaterials that are biocompatible, modifiable, structurally sound, and versatile. Porous silicon possesses a range of properties that make it ideal for a variety of biomedical applications, such as controllable geometry, tunable nanoporous structure, large pore volume/high specific surface area, and versatile surface chemistry. This book provides a fully updated and detailed overview of the range of biomedical applications for porous silicon. Part One offers the reader a helpful insight into the fundamentals and beneficial properties of porous silicon, including thermal properties and stabilization, photochemical and nonthermal chemical modification, protein modification, and biocompatibility. The book then builds on the systematic detailing of each biomedical application using porous silicon, from bioimaging and sensing to drug delivery and tissue engineering. This new edition also includes new chapters on in-vivo assessment of porous silicon, photodynamic and photothermal therapy, micro- and nanoneedles, Raman imaging, cancer immunotherapy, and more. With its acclaimed editor and international team of expert contributors, Porous Silicon for Biomedical Applications, Second Edition, is a technical resource and indispensable guide for all those involved in the research, development, and application of porous silicon and other biomaterials, while providing a comprehensive introduction for students and academics interested in this field. - Reviews the fundamental aspects of porous silicon, including the fabrication and unique properties of this useful material. - Discusses a broad selection of biomedical applications, offering a detailed insight into the benefits of porous silicon in both research and clinical settings. - Includes fully updated content from the previous edition, as well as brand new chapters, covering topics such as porous silicon micro- and nanoneedles, and cancer immunotherapy.

Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1351990616
Category : Technology & Engineering
Languages : en
Pages : 3817

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Author: Mojtaba Kahrizi
Publisher: BoD – Books on Demand
ISBN: 9533079061
Category : Science
Languages : en
Pages : 316

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Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.

Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1420055194
Category : Technology & Engineering
Languages : en
Pages : 672

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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Author: Baoguo Han
Publisher: Elsevier
ISBN: 0128199237
Category : Technology & Engineering
Languages : en
Pages : 588

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Nanosensors for Smart Cities covers the fundamental design concepts and emerging applications of nanosensors for the creation of smart city infrastructures. Examples of major applications include logistics management, where nanosensors could be used in active transport tracking devices for smart tracking and tracing, and in agri-food productions, where nanosensors are used in nanochips for identity, and food inspection, and smart storage. This book is essential reading for researchers working in the field of advanced sensors technology, smart city technology and nanotechnology, and stakeholders involved in city management. Nanomaterials based sensors (nanosensors) can offer many advantages over their microcounterparts, including lower power consumption, high sensitivity, lower concentration of analytes, and smaller interaction distance between object and sensor. With the support of artificial intelligence (AI) tools, such as fuzzy logic, genetic algorithms, neural networks, and ambient-intelligence, sensor systems are becoming smarter. - Provides information on the fabrication and fundamental design concepts of nanosensors for intelligent systems - Explores how nanosensors are being used to better monitor and maintain infrastructure services, including street lighting, traffic management and pollution control - Assesses the challenges for creating nanomaterials-enhanced sensors for mass-market consumer products

Author:
Publisher:
ISBN:
Category : Actuators
Languages : en
Pages : 1020

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Author: Marc J. Madou
Publisher: CRC Press
ISBN: 142005516X
Category : Technology & Engineering
Languages : en
Pages : 652

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Book Description
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology