Author: Michael T. PostekPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819422781
Category : Integrated circuits
Languages : en
Pages : 296
Book Description
Microlithography and Metrology in Micromachining
Author: Microlithography and Metrology in Micromachining II
Author: Michael T. PostekPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819422781
Category : Integrated circuits
Languages : en
Pages : 296
Book Description
Microlithography and Metrology in Micromachining
Author: Michael T. PostekPublisher:
ISBN: 9780819420060
Category : Measurement
Languages : en
Pages : 0
Book Description
Microlithography and Metrology in Micromachining
Author: Michael T. PostekPublisher:
ISBN: 9780819420060
Category : Measurement
Languages : en
Pages :
Book Description
National Semiconductor Metrology Program
Author: National Institute of Standards and Technology (U.S.)Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 160
Book Description
National Semiconductor Metrology Program
Author: National Semiconductor Metrology Program (U.S.)Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 136
Book Description
National Semiconductor Metrology Program, NIST List OF Publications, LP 103, May 2000
Author: National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999
Author: Microlithography and Metrology in Micromachining III
Author: Craig FriedrichPublisher: SPIE-International Society for Optical Engineering
ISBN: 9780819426574
Category : Measurement
Languages : en
Pages : 134
Book Description
The MEMS Handbook
Author: Mohamed Gad-el-HakPublisher: CRC Press
ISBN: 9781420050905
Category : Technology & Engineering
Languages : en
Pages : 1386
Book Description
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.