Author: James E. SteinwallPublisher:
ISBN:
Category : Microfabrication
Languages : en
Pages : 376
Book Description
Microfabrication and Mechanical Properties of Free Standing Thin Films
Author: James E. SteinwallPublisher:
ISBN:
Category : Microfabrication
Languages : en
Pages : 376
Book Description
Measurement of Adhesion and Mechanical Properties of Thin Films Using Microfabricated Structures
Author: Mark George AllenMicrofabricated Structures for the Measurement of Adhesion and Mechanical Properties of Polymer Films
Author: Mark G. AllenPublisher:
ISBN:
Category :
Languages : en
Pages : 7
Book Description
Microfabricated test structures for the in-situ measurement of adhesion of thin films have been described. Young's modulus and residual tensile stress are determined from pre-peel measurement of the load-deflection behavior of suspended membranes. On systems of weak adhesion, a blister test using suspended membranes has been carried out. For systems of good adhesion, an island test structure has been developed allowing even thin films to be tested. Mechanical models for all three structures are described. Keywords: Polymer, Polyimide, Mechanical properties, Adhesion, Film, Microfabrication, Stress, Modulus, Blister test, Critical pressure, Peel.
Microfabrication and Characterization of PVDF Copolymer Thin Films Suitable for Integrating with Optical Microsystems
Author: Kiran Kumar ChatrathiPublisher:
ISBN:
Category :
Languages : en
Pages : 0
Book Description
In the emerging field of Micro Electro Mechanical Systems (MEMS) silicon continues to be the best material to integrate with mechanical and electrical miniature systems such as microsensors and microactuators that use various schemes of sensing and actuation. The functionality of these systems may be enhanced from extended type of materials with enhanced sensitivity and improved actuation. The integration of piezoelectric materials in MEMS facilitates the functionality of the devices. PVDF (Polyvinylidene fluoride) and its copolymers in the domain of piezoelectric materials have always been upfront to integrate with MEMS, in particular, copolymers of PVDF possess a much enhanced material properties and can eventually deliver better performance than PVDF homopolymer. The application of copolymers extends to all classes of miniaturized systems such as optical microsystems, sensors, actuators etc. In thin film technology, it is very important to have a better understanding of the crystal structure and material properties of thin films. In the present work microfabrication and characterization of P(VDF-TrFE) copolymer thin films are carried out. Various deposition techniques for PVDF thin films are presented and spin coating technique is finally adopted for microfabrication of PVDF copolymer thin films due to its advantages. Further spinning characterization of PVDF copolymer thin films are presented. An optimized set of spin parameters are found in order to develop a uniformly deposited PVDF copolymer thin films. In the current work, polarization of the films is performed through step-wise poling method. A simple experimental setup for stepwise poling method is presented. The main aspect of the present work is focused on the material characterization of the microfabricated PVDF copolymer thin films through "Fourier Transform Infrared Spectroscopy" (FTIR). An in-depth FTIR analysis on the effect of annealing PVDF copolymer thin films is presented and the analysis is extended through the study on the variation of the significant optical parameters such as absorbance and transmittance spectra in the infrared region. The study focuses on the variation of the spectra in the piezoelectric phase of the thin films. Further, the effect of polarization (poling) of PVDF copolymer thin films on the absorbance and transmittance spectra is also presented, FTIR analysis is further extended through comparison of the spectra of the microfabricated PVDF copolymer thin films with the available commercial PVDF thin films. In the present work, the mechanical properties of the spin coated PVDF copolymer thin are characterized through the measurement of piezoelectric constant, d 31 for the considered geometry of PVDF copolymer thin films. The results are compared with the measured piezoelectric constant of commercial PVDF thin film. Finally a novel variable optical attenuator (VOA) through piezoelectric actuation is presented. The design of the VOA using PVDF copolymer thin films is discussed and the optical attenuation properties of the VOA are analyzed.
Introduction to Microfabrication
Author: Sami FranssilaPublisher: John Wiley & Sons
ISBN: 0470020563
Category : Technology & Engineering
Languages : en
Pages : 424
Book Description
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Fundamentals of Microfabrication
Author: Marc J. MadouPublisher: CRC Press
ISBN: 1482274000
Category : Technology & Engineering
Languages : en
Pages : 764
Book Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Preparation and Properties of Thin Films
Author: K. N. TuPublisher: Elsevier
ISBN: 1483218295
Category : Technology & Engineering
Languages : en
Pages : 351
Book Description
Treatise on Materials Science and Technology, Volume 24: Preparation and Properties of Thin Films covers the progress made in the preparation of thin films and the corresponding study of their properties. The book discusses the preparation and property correlations in thin film; the variation of microstructure of thin films; and the molecular beam epitaxy of superlattices in thin film. The text also describes the epitaxial growth of silicon structures (thermal-, laser-, and electron-beam-induced); the characterization of grain boundaries in bicrystalline thin films; and the mechanical properties of thin films on substrates. The ion beam modification of thin film; the use of thin alloy films for metallization in microelectronic devices; and the fabrication and physical properties of ultrasmall structures are also encompassed. Materials scientists and materials engineers will find the book invaluable.
Mechanical Properties of Free-standing Polycrystalline Metallic Thin Films and Multilayers
Author: Haibo HuangPublisher:
ISBN:
Category : Metallic films
Languages : en
Pages : 348
Book Description
Manufacturing Techniques for Microfabrication and Nanotechnology
Author: Marc J. MadouPublisher: CRC Press
ISBN: 1439895309
Category : Technology & Engineering
Languages : en
Pages : 670
Book Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
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