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Microelectromechanical Systems: Volume 1139

Microelectromechanical Systems: Volume 1139 PDF Author: Srikar Vengallatore
Publisher: Cambridge University Press
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 272

Book Description
Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.

Microelectromechanical Systems: Volume 1139

Microelectromechanical Systems: Volume 1139 PDF Author: Srikar Vengallatore
Publisher: Cambridge University Press
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 272

Book Description
Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.

Microelectromechanical Systems: Volume 1139

Microelectromechanical Systems: Volume 1139 PDF Author: Srikar Vengallatore
Publisher: Cambridge University Press
ISBN: 9781107408395
Category : Technology & Engineering
Languages : en
Pages : 264

Book Description
Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.

MEMS and Nanotechnology, Volume 5

MEMS and Nanotechnology, Volume 5 PDF Author: Gordon Shaw III
Publisher: Springer Science & Business Media
ISBN: 3319007807
Category : Technology & Engineering
Languages : en
Pages : 135

Book Description
MEMS and Nanotechnology, Volume 5: Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics, the fifth volume of eight from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of areas, including: Microelectronics Packaging Single Atom/Molecule Mechanical Testing MEMS Devices & Fabrication In-Situ Mechanical Testing Nanoindentation Experimental Analysis of Low-Dimensional Materials for Nanotechnology

Materials and Failures in MEMS and NEMS

Materials and Failures in MEMS and NEMS PDF Author: Atul Tiwari
Publisher: John Wiley & Sons
ISBN: 1119083869
Category : Technology & Engineering
Languages : en
Pages : 435

Book Description
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Microelectromechanical Systems-Materials and Devices III: Volume 1222

Microelectromechanical Systems-Materials and Devices III: Volume 1222 PDF Author: Jörg Bagdahn
Publisher: Cambridge University Press
ISBN: 9781605111957
Category : Technology & Engineering
Languages : en
Pages : 0

Book Description
Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.

Microsystems for Pharmatechnology

Microsystems for Pharmatechnology PDF Author: Andreas Dietzel
Publisher: Springer
ISBN: 3319269208
Category : Technology & Engineering
Languages : en
Pages : 353

Book Description
This book provides a comprehensive, state-of-the-art review of microfluidic approaches and applications in pharmatechnology. It is appropriate for students with an interdisciplinary interest in both the pharmaceutical and engineering fields, as well as process developers and scientists in the pharmaceutical industry. The authors cover new and advanced technologies for screening, production by micro reaction technology and micro bioreactors, small-scale processing of drug formulations, and drug delivery that will meet the need for fast and effective screening methods for drugs in different formulations, as well as the production of drugs in very small volumes. Readers will find detailed chapters on the materials and techniques for fabrication of microfluidic devices, microbioreactors, microsystems for emulsification, on-chip fabrication of drug delivery systems, respiratory drug delivery and delivery through microneedles, organs-on-chip, and more.

Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605

Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 PDF Author: Maarten De Boer
Publisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 344

Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Materials Science of Microelectromechanical Systems (MEMS) Devices III:

Materials Science of Microelectromechanical Systems (MEMS) Devices III: PDF Author: Harold Kahn
Publisher: Cambridge University Press
ISBN: 9781107412293
Category : Technology & Engineering
Languages : en
Pages : 366

Book Description
Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.

Artificially Induced Grain Alignment in Thin Films: Volume 1150

Artificially Induced Grain Alignment in Thin Films: Volume 1150 PDF Author: Vladimir Matias
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 216

Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Microfabrication for Microfluidics

Microfabrication for Microfluidics PDF Author: Sang-Joon John Lee
Publisher: Artech House
ISBN: 1596934727
Category : Electronic books
Languages : en
Pages : 276

Book Description
Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the fabricated structures as they are applied to microfluidic sensor and actuator functions. You find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons.