Author: Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 272
Book Description
MEMS/MOEMS Components and Their Applications
Author: Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 272
Book Description
MEMS
Author: Publisher:
ISBN: 9780819452528
Category : Microelectromechanical systems
Languages : en
Pages :
Book Description
MEMS/MOEMS Components and Their Applications
Author: MEMS/MOEMS Components and Their Applications
Author: Publisher:
ISBN:
Category : Microelectromechanical systems
Languages : en
Pages : 0
Book Description
MEMS/MOEMS Components and Their Applications II
Author: MEMS/MOEMS Components and Their Applications V
Author: Srinivas A. TadigadapaPublisher: Society of Photo Optical
ISBN: 9780819470607
Category : Technology & Engineering
Languages : en
Pages : 136
Book Description
Includes Proceedings Vol. 7821
MEMS/MOEMS Components and Their Applications V. Special Focus Topics
Author: MEMS/MOEMS Components and Their Applications IV
Author: Reza GhodssiPublisher: Society of Photo Optical
ISBN: 9780819465771
Category : Technology & Engineering
Languages : en
Pages : 202
Book Description
Includes Proceedings Vol. 7821
MEMS/MOEMS Components and Their Applications III
Author: Scot S. OlivierPublisher: Society of Photo Optical
ISBN: 9780819461551
Category : Technology & Engineering
Languages : en
Pages : 302
Book Description
Includes Proceedings Vol. 7821
MEMS and MOEMS Technology and Applications
Author: P. Rai-ChoudhuryPublisher: SPIE Press
ISBN: 9780819437167
Category : Technology & Engineering
Languages : en
Pages : 544
Book Description
The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.